Patents by Inventor Jamin KU

Jamin KU has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

COMPOSITION FOR REMOVING EDGE BEAD FROM METAL-CONTAINING RESISTS, AND METHOD OF FORMING PATTERNS INCLUDING STEP OF REMOVING EDGE BEAD USING SAME

Publication number: 20240369935

Abstract: Provided are composition for removing edge beads from metal-containing resists, and a method of forming patterns including step of removing edge beads using the same and the composition includes an organic solvent and a compound having an AMW of 7 g/mol·ea or more.

Type: Application

Filed: July 4, 2022

Publication date: November 7, 2024

Inventors: Hyungrang MOON, Minyoung LEE, Ryunmin HEO, Jamin KU, Donghyung LEE, Dasom HAN, Minsoo KIM, Jaehyun KIM
COMPOSITION FOR REMOVING EDGE BEAD OF METAL-CONTAINING RESIST, AND METHOD FOR FORMING PATTERN COMPRISING STEP OF REMOVING EDGE BEAD BY USING SAME

Publication number: 20240329536

Abstract: Provided are composition for removing edge beads from metal-containing resists, and a method of forming patterns including a step of removing edge beads using the same and the composition includes an organic solvent and a compound having an A log P3 of greater than or equal to 30 ?2.

Type: Application

Filed: July 4, 2022

Publication date: October 3, 2024

Inventors: Hyungrang MOON, Minyoung LEE, Ryunmin HEO, Jamin KU, Donghyung LEE, Dasom HAN, Minsoo KIM, Jaehyun KIM

COMPOSITION FOR REMOVING EDGE BEAD FROM METAL-CONTAINING RESISTS, AND METHOD OF FORMING PATTERNS INCLUDING STEP OF REMOVING EDGE BEAD USING SAME

COMPOSITION FOR REMOVING EDGE BEAD OF METAL-CONTAINING RESIST, AND METHOD FOR FORMING PATTERN COMPRISING STEP OF REMOVING EDGE BEAD BY USING SAME