Patents by Inventor Jamshid Sorooshian

Jamshid Sorooshian has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Annealing of CMP polishing pads
    Publication number: 20030207661
    Abstract: A manufactured chemical mechanical polishing pad is annealed after manufacture to improve its operating characteristics. Annealing can stabilize the operational properties of the pad, such as coefficient of thermal expansion and compressibility. In one embodiment, annealing partially or fully completes a curing process that was incomplete after the pad was manufactured.
    Type: Application
    Filed: May 1, 2002
    Publication date: November 6, 2003
    Inventors: Alexander Tregub, Jamshid Sorooshian, Mansour Moinpour