Patents by Inventor Jan C.E. Broekroelofs

Jan C.E. Broekroelofs has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Laser separation of semiconductor elements formed in a wafer of semiconductor material
    Patent number: 5922224
    Abstract: A method of separating semiconductor elements (2) formed in a wafer of semiconductor material (1). A score (8) is formed in a surface (3) of the wafer (1) through local evaporation of semiconductor material by heat originating from radiation (10). This radiation (10) is generated by a laser (11) and focused on the wafer (1) by an optical system (12). The wafer (1) is moved relative to the radiation (10) focused thereon along a path (9) which follows the score (8) to be formed. The radiation (10) of the laser (11) is focused on the wafer (1) in the form of at least two beams (14 and 15), the wafer (1) being moved relative to the beams (14 and 15) such that the beams (14 and 15) travel the same path (9) one after the other. A deeper score (8) can be formed than by an unsplit beam of the same energy as the two beams together.
    Type: Grant
    Filed: February 4, 1997
    Date of Patent: July 13, 1999
    Assignee: U.S. Philips Corporation
    Inventor: Jan C.E. Broekroelofs