Patents by Inventor Jan F. Hoogkamp

Jan F. Hoogkamp has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Crash prevention in positioning apparatus for use in lithographic projection apparatus
    Patent number: 6498350
    Abstract: In a multi-table lithographic apparatus in which substrate tables may be exchanged between a first working zone where substrates are loaded onto and removed from the table and a second working zones where wafers are exposed, collision prevention means are provided to prevent collisions between tables in the exchange process. The collision prevention means may be formed of a labyrinth or a revolving door. The exchange process may be controlled by shuttles, optionally including drive means, that are interlinked so that the tables can only be exchanged between zones together.
    Type: Grant
    Filed: December 19, 2000
    Date of Patent: December 24, 2002
    Assignee: ASML Netherlands B.V.
    Inventors: Yim Bun P. Kwan, Engelbertus A. F. van de Pasch, Andreas B. G. Ariens, Edwin J. Buis, Jan F. Hoogkamp, Robert-Han Munnig Schmidt
  • Crash prevention in positioning apparatus for use in lithographic projection apparatus
    Publication number: 20010004105
    Abstract: In a multi-table lithographic apparatus in which substrate tables may be exchanged between a first working zone where substrates are loaded onto and removed from the table and a second working zones where wafers are exposed, collision prevention means are provided to prevent collisions between tables in the exchange process. The collision prevention means may be formed of a labyrinth or a revolving door. The exchange process may be controlled by shuttles, optionally including drive means, that are interlinked so that the tables can only be exchanged between zones together.
    Type: Application
    Filed: December 19, 2000
    Publication date: June 21, 2001
    Inventors: Yim Bun P. Kwan, Engelbertus A.F. van de Pasch, Andreas B.G. Ariens, Edwin J. Buis, Jan F. Hoogkamp, Robert-Han Munnig Schmidt