Abstract: A method for producing an ohmic contact on a crystallographic C-side of a silicon carbide substrate. The method includes: applying a layer stack to the crystallographic C-side of the silicon carbide substrate, the layer stack including at least one semiconducting layer containing germanium, and at least one metallic layer; and producing a point-by-point liquid phase of the layer stack, a surface of the layer stack being scanned using laser beams.

Abstract: A method for forming an electrical contact is provided. The method includes grinding a silicon carbide surface using a grinding disk which includes a grinding face containing nickel or a nickel compound, such that particles of the nickel or nickel compound from the grinding disk are embedded in the ground silicon carbide surface, and hardening the ground silicon carbide surface with the aid of a laser, such that at least some of the embedded nickel particles form a nickel silicide with silicon from the silicon carbide.

Abstract: A trench transistor. The transistor including: a semiconductor region, a trench structure formed in the semiconductor region; a gate insulation layer and an electrically conductive gate layer formed on the gate insulation layer in the trench structure, and a gate contact, which is electrically conductively connected to the gate layer in an edge area of the trench transistor. A thickness of the gate insulation layer in the edge area of the trench transistor is greater than in an active area of the trench transistor.

Abstract: A power transistor cell including a layer arrangement, which includes a front side and a rear side, the front side being situated opposite the rear side. A trench extends starting from, and perpendicular to, the front side along a first direction into the layer arrangement. The trench extends at least into a current-spreading layer, and expands along a second direction, which is situated perpendicularly to the first direction. Field shielding areas are situated at least partially in the current-spreading layer, wherein source areas and field shielding contacting areas are situated alternatingly along the second direction. One portion each of the body areas is situated between each source area and each field shielding contacting area. The field shielding contacting areas connect the field shielding areas to first metal areas on the front side. The field shielding contacting areas make contact at least partially with side faces of the trench.

Abstract: A semiconductor device. The semiconductor device includes a drift region of a first conductivity type, a channel region of a second conductivity type on the drift region, a source region of the first conductivity type on the channel region, a trench, which forms an insulated gate and extends through the source region and the channel region so that its bottom is situated in the drift region, and at least one buried region of the second conductivity type, which extends within the drift region from an edge region of the drift region to the trench and is in direct contact with a first subarea of a surface of the trench, a second subarea of a surface of the trench being in direct contact with the drift region, and the buried region being connected to the source region in an electrically conducting manner.

Abstract: A method for manufacturing a power transistor. The method includes: applying a first epitaxial layer including a first doping concentration to a front side of a semiconductor substrate, producing an expansion layer, which is situated inside the first epitaxial layer, producing various implanted areas starting from the front side of the semiconductor substrate, producing a trench structure starting from the front side of the semiconductor substrate, producing first isolation areas in the surroundings of the trench structure, producing transistor heads, and applying metal layers.

Abstract: A transistor cell including a semiconductor substrate, which has a front side and a rear side, the front side being situated opposite the rear side. An epitaxial layer is situated on the front side. Channel regions are situated on the epitaxial layer. Source regions are situated on the channel regions. A trench and field shielding regions extending from the front side of the semiconductor substrate into the epitaxial layer, the field shielding regions each being situated laterally spaced apart from the trench and the trench having a shallower depth than the field shielding regions. An implanted expansion region having a particular thickness is situated below the trench.

Abstract: A vertical power transistor including a semiconductor substrate, which has a front side on which at least one epitaxial layer, one channel layer, and one source layer are situated. The epitaxial layer includes a first semiconductor material which has a first doping, and a plurality of first trenches and second trenches, the first trenches and the second trenches being situated alternatingly and extending perpendicularly at least into the channel layer starting from a surface of the source layer, an area extending perpendicularly into the epitaxial layer, starting from an underside of each first trench bottom, the area including a second semiconductor material which encompasses a second doping.