Abstract: A vacuum pump in accordance with the invention, in particular a scroll vacuum pump, comprises a first spiral element that has a first wall that extends spirally about a first axis, that extends in an axial direction from a first support, and that has a first free end face facing away from the first support, and a second spiral element that has a second wall that extends spirally about a second axis, that extends in the axial direction from a second support, and that has a second free end face facing away from the second support, wherein the first spiral element and the second spiral element are movable relative to one another and are arranged such that the first wall and the second wall sealingly engage into one another while forming pumping spaces, wherein the free end face of at least one of the walls has a recess, in particular a groove, which extends in a longitudinal direction of the wall and in which at least one seal is movably arranged, and wherein the recess is laterally bounded by at least one inner

Abstract: A drive device for a protective hood of a machine includes a counterweight, a pulling means connecting the protective hood to the counterweight, a motor, and a freewheel. The freewheel connects the motor to the pulling means and is arranged to block when a weight force of the protective hood is greater than a weight force of the counterweight. The freewheel may be a linear freewheel or the freewheel may operate between two rotatable elements. The freewheel may be a frictionally locking freewheel or a positive locking freewheel.

Abstract: A vacuum pump in accordance with the invention, in particular a scroll vacuum pump, comprises a first spiral element that has a first wall that extends spirally about a first axis, that extends in an axial direction from a first support, and that has a first free end face facing away from the first support, and a second spiral element that has a second wall that extends spirally about a second axis, that extends in the axial direction from a second support, and that has a second free end face facing away from the second support, wherein the first spiral element and the second spiral element are movable relative to one another and are arranged such that the first wall and the second wall sealingly engage into one another while forming pumping spaces, wherein the free end face of at least one of the walls has a recess, in particular a groove, which extends in a longitudinal direction of the wall and in which at least one seal is movably arranged, and wherein the recess is laterally bounded by at least one inner

Abstract: A vacuum pump includes a fan including a rotational speed to be controlled to cool the vacuum pump, a temperature sensor, and a control device that regulates the rotational speed of the fan in dependence on a power consumption of a drive of the vacuum pump and on a temperature measured by the temperature sensor. Another vacuum pump includes an electrically driven fan, an air guide hood, and a conductor that leads from the fan to a supply connection for the fan. The conductor is connected to the supply connection via an electrical connector. The connector is separated from an air flow path, defined by the air guide hood, by a partition wall.

Abstract: The invention relates to a scroll pump comprising a pressure sensor integrated into the scroll pump.

Abstract: A drive device for a protective hood of a machine includes a counterweight, a pulling means connecting the protective hood to the counterweight, a motor, and a freewheel. The freewheel connects the motor to the pulling means and is arranged to block when a weight force of the protective hood is greater than a weight force of the counterweight. The freewheel may be a linear freewheel or the freewheel may operate between two rotatable elements. The freewheel may be a frictionally locking freewheel or a positive locking freewheel.

Abstract: The present invention relates to a vacuum pump, in particular to a turbomolecular pump, having at least one pump stage and having a pressure determination unit for determining a pressure present at a suction side of the vacuum pump, said pump comprising a measurement device, with a measurement tap of the measurement device being provided in the region of the pump stage or downstream of the pump stage.

Abstract: The invention relates to a scroll pump comprising a pressure sensor integrated into the scroll pump.

Abstract: A system (1) dispenses dosages of a powdery substance. It has a robotic handler (2), a weighing module (8) with a weighing pan (9), at least one storage rack (4) for holding a plurality of dispensing heads (3) and at least one storage rack (6) for holding a plurality of vials (5), a dosage dispenser unit (11) with a dispensing head receiver (12), a vial handling tool (17) and a dispensing head handling tool (18), a tool-docking station (19) for the handling tools, and a controller terminal unit (20). Different weighing pan adapters (15) adapt the weighing pan to different shapes and sizes of vials. Relative to a vertical working orientation, tlower portions of the weighing pan adapters are identical, to fit the weighing pan, but upper portions are different, to accommodate different shapes and sizes of vials. A station (16) is provided for storing the weighing pan adapters.

Abstract: The present invention relates to a vacuum pump, in particular to a turbomolecular pump, having at least one pump stage and having a pressure determination unit for determining a pressure present at a suction side of the vacuum pump, said pump comprising a measurement device, with a measurement tap of the measurement device being provided in the region of the pump stage or downstream of the pump stage.

Abstract: A system (1) dispenses dosages of a powdery substance. It has a robotic handler (2), a weighing module (8) with a weighing pan (9), at least one storage rack (4) for holding a plurality of dispensing heads (3) and at least one storage rack (6) for holding a plurality of vials (5), a dosage dispenser unit (11) with a dispensing head receiver (12), a vial handling tool (17) and a dispensing head handling tool (18), a tool-docking station (19) for the handling tools, and a controller terminal unit (20). Different weighing pan adapters (15) adapt the weighing pan to different shapes and sizes of vials. Relative to a vertical working orientation, tlower portions of the weighing pan adapaters are identical, to fit the weighing pan, but upper portions are different, to accommodate different shapes and sizes of vials. A station (16) is provided for storing the weighing pan adapters.

Abstract: A vacuum pump has a working space, a bearing space, a dividing wall arranged between the working space and the bearing space and at least one rotor shaft which extends through the dividing wall and which forms a gap with the dividing wall and having a blocking device for blocking between the working space and the bearing space. The blocking device is formed by a Siegbahn pump stage which is configured for providing a pump action passing through the gap between the working space and the bearing space.

Abstract: A vacuum pump includes a pump inlet, a pump outlet, a rotor rotatable about an axis of rotation, at least one process gas pump stage for conveying a process gas present at the pump inlet from the pump inlet to the pump outlet, a motor space, and a drive motor which is arranged in the motor space, is configured for rotationally driving the rotor and which has a motor stator, wherein at least one gas path is provided for the process gas from the pump inlet to the pump outlet which leads through the motor space and which leads at least sectionally along the motor stator or through the motor stator.

Abstract: A stator element for a Holweck pump stage has a base shape of substantially cylinder jacket shape or a kit of parts for a stator element for a Holweck pump stage which has a base shape of a substantially cylinder jacket shape, wherein the stator element or the kit of parts comprises a plurality of stator parts which are separate from one another, which are assembled to form the stator element or can be assembled to form the stator element. A vacuum pump having a Holweck pump stage as well as to a method of manufacturing a stator element for a Holweck pump stage or of manufacturing a kit of parts for a stator element for a Holweck pump stage are also disclosed.

Abstract: The invention relates to a vacuum pump having at least one molecular pump stage, in particular a Holweck stage, which includes a rotor member which forms the pump-active surface of the molecular pump stage and having at least one side channel pump stage which is arranged downstream of the molecular pump stage and which includes a plurality of rotor elements, wherein the rotor elements of the side channel pump stage are supported by the rotor member of the molecular pump stage. The invention further relates to a vacuum pump having at least one molecular pump stage, in particular a Holweck stage, and having at least one side channel pump stage which is arranged downstream of the molecular pump stage and which includes a plurality of rotor elements, wherein the side channel pump stage is arranged between a pump inlet and the molecular pump stage.

Abstract: A vacuum pump includes a housing having an axial inlet a pumping unit including a stator, a rotor rotatably supported in the stator, and a drive for driving the rotor. At least one housing part which has at least one outlet, is placed on the housing in an axial direction and is connected with the housing.

Abstract: A vacuum pump includes a pump inlet, a pump outlet, a rotor rotatable about an axis of rotation, at least one process gas pump stage for conveying a process gas present at the pump inlet from the pump inlet to the pump outlet, a motor space, and a drive motor which is arranged in the motor space, is configured for rotationally driving the rotor and which has a motor stator, wherein at least one gas path is provided for the process gas from the pump inlet to the pump outlet which leads through the motor space and which leads at least sectionally along the motor stator or through the motor stator.

Abstract: A vacuum pump has a working space, a bearing space, a dividing wall arranged between the working space and the bearing space and at least one rotor shaft which extends through the dividing wall and which forms a gap with the dividing wall and having a blocking device for blocking between the working space and the bearing space. The blocking device is formed by a Siegbahn pump stage which is configured for providing a pump action passing through the gap between the working space and the bearing space.

Abstract: A stator element for a Holweck pump stage has a base shape of substantially cylinder jacket shape or a kit of parts for a stator element for a Holweck pump stage which has a base shape of a substantially cylinder jacket shape, wherein the stator element or the kit of parts comprises a plurality of stator parts which are separate from one another, which are assembled to form the stator element or can be assembled to form the stator element. A vacuum pump having a Holweck pump stage as well as to a method of manufacturing a stator element for a Holweck pump stage or of manufacturing a kit of parts for a stator element for a Holweck pump stage are also disclosed.

Abstract: A pumping system for evacuating gas from a plurality of chambers, includes at least one turbomolecular pump, at least two fore-vacuum pumps, at least one connection conduit extending between the at least two fore-vacuum pumps. and at least one transverse constriction for at least one of reducing and regulating gas flow.