Abstract: The invention relates to a method of manufacturing an electrostatic clamp configured to electrostatically clamp an article to an article support in a lithographic apparatus. The method includes providing a first layer of material, etching a recess in the first layer of material, and disposing an electrode in the recess of the first layer of material.

Abstract: The invention relates to a method of manufacturing an electrostatic clamp configured to electrostatically clamp an article to an article support in a lithographic apparatus. The method includes providing a first layer of material, etching a recess in the first layer of material, and disposing an electrode in the recess of the first layer of material.

Abstract: Light sensor, comprising a non-translucent layer (1) having a translucent aperture (2), and a sensor array layer (3), comprising an array of op to-electrical sensor elements (3a-d), as well as a translucent solid first carrier layer (4) to which said non-translucent layer is applied at one side and said sensor array layer at the other side. A multitude of such light sensors can be manufactured by taking a first substrate (4) which is suitable as a translucent solid first carrier layer for said multitude of light sensors, applying the non-translucent layers (1) including an aperture (2) in each of them for said multitude of light sensors at one side of the first substrate and applying the sensor array layers (3) for said multitude of light sensors at the other side of the first substrate and, finally, separating the individual light sensors (7a-b). The light sensor may comprise an integrated opto-electric power supply (8, 9).

Abstract: A lithographic projection apparatus is disclosed. The apparatus includes an illuminator for conditioning a beam of radiation, and an article holder. The article holder includes a plurality of protrusions arranged to provide a substantially flat plane of support for supporting an article to be placed in a beam path of the beam of radiation. The protrusions are generally spaced apart equidistantly at a first distance. The article holder also includes a pair of electrodes for clamping the article to the holder. The electrodes are disposed in substantially the same plane above or below the protrusions, and are spaced apart from one another by a gap. Neighboring protrusions within the plurality of protrusions that are located on opposite sides of the gap are spaced apart by a second distance that is greater than the first distance.

Abstract: A lithographic apparatus is disclosed. The apparatus includes an illumination system arranged to condition a radiation beam, and an article support configured to support an article to be placed in a beam path of the radiation beam. The article support includes a plurality of bonded layers. At least one of the bonded layers includes a plurality of recesses facing another of the bonded layers, so as to reduce a bonding surface between the bonded layers.

Abstract: The invention relates to a method of manufacturing an electrostatic clamp configured to electrostatically clamp an article to an article support in a lithographic apparatus. The method includes providing a first layer of material, etching a recess in the first layer of material, and disposing an electrode in the recess of the first layer of material.

Abstract: A lithographic projection apparatus is disclosed. The apparatus includes an illuminator for conditioning a beam of radiation, and an article holder. The article holder includes a plurality of protrusions arranged to provide a substantially flat plane of support for supporting an article to be placed in a beam path of the beam of radiation, and at least one clamping electrode for generating an electrostatic clamping force for clamping the article against the article holder. The clamping electrode includes an electric field changer for locally changing the electrostatic clamping force for leveling local height variations of the substrate.

Abstract: A lithographic projection apparatus is disclosed. The apparatus includes an illuminator for conditioning a beam of radiation, and an article holder. The article holder includes a plurality of protrusions arranged to provide a substantially flat plane of support for supporting an article to be placed in a beam path of the beam of radiation. The protrusions are generally spaced apart equidistantly at a first distance. The article holder also includes a pair of electrodes for clamping the article to the holder. The electrodes are disposed in substantially the same plane above or below the protrusions, and are spaced apart from one another by a gap. Neighboring protrusions within the plurality of protrusions that are located on opposite sides of the gap are spaced apart by a second distance that is greater than the first distance.

Abstract: A lithographic apparatus is disclosed. The apparatus includes an illumination system arranged to condition a radiation beam, and an article support configured to support an article to be placed in a beam path of the radiation beam. The article support includes a plurality of bonded layers. At least one of the bonded layers includes a plurality of recesses facing another of the bonded layers, so as to reduce a bonding surface between the bonded layers.

Abstract: A lithographic projection apparatus is disclosed. The apparatus includes an illuminator for conditioning a beam of radiation, and an article holder. The article holder includes a plurality of protrusions arranged to provide a substantially flat plane of support for supporting an article to be placed in a beam path of the beam of radiation, and at least one clamping electrode for generating an electrostatic clamping force for clamping the article against the article holder. The clamping electrode includes an electric field changer for locally changing the electrostatic clamping force for leveling local height variations of the substrate.

Abstract: Robotically drivable interface mechanism for coupling to a device and for coupling to an end effector attachable to the end of a robot arm. The interface mechanism having a first coupler to couple with an associated second coupler on the device and a third coupler to couple with an associate fourth coupler on the end effector. The first coupler is connectable to an actuator included in the end effector, when the interface mechanism is coupled to the end effector. The first coupler has at least one first roller for cooperating with the second coupler formed by at least one slot in the device.

Abstract: A mechanical linear guide for making a body move in an axial direction, comprising a system which is preferably made up of reinforced leaf springs and/or hole-type hinges, and which is rotationally symmetrical about an axial direction and mirror-symmetrical about a plane perpendicular to the axial direction. The system is connected to a fixed base at six points (A, D, I, L, M, P), and a body (18) is suspended between two points (F, G) in such a way that it can carry out only movement in the axial direction, and not in the lateral direction.