Patents by Inventor Jan Kater

Jan Kater has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Pellicle for EUV lithography
    Patent number: 11977326
    Abstract: A wafer including a mask on one face and at least one layer on an opposite face, wherein the mask has at least one scribeline which overlies at least a portion of the opposite face which is substantially free of the at least one layer is described. Also described is a method of preparing a pellicle, the method including: providing a wafer having a mask on one face and at least one layer on an opposite face, defining a scribeline in the mask, and selectively removing a portion of the at least one layer which at least partially overlies the scribeline as well as a method of preparing a pellicle, the method including: providing a pellicle core, and removing at least some material from at least one face of the pellicle core in a non-oxidising environment. In any aspect, the pellicle may include a metal nitride layer.
    Type: Grant
    Filed: April 12, 2019
    Date of Patent: May 7, 2024
    Assignee: ASML NETHERLANDS B.V.
    Inventors: Dennis De Graaf, Richard Beaudry, Maxime Biron, Paul Janssen, Thijs Kater, Kevin Kornelsen, Michael Alfred Josephus Kuijken, Jan Hendrik Willem Kuntzel, Stephane Martel, Maxim Aleksandrovich Nasalevich, Guido Salmaso, Pieter-Jan Van Zwol
  • Swirl tube separator
    Patent number: 7648544
    Abstract: Swirl tube separator for separating solids from a gas-solid containing feed comprising a tubular housing, an inlet for introducing a gas-solids mixture at one end of said housing, a solids outlet opening at the opposite end of said housing, and a co-axial positioned tubular gas outlet conduit placed at an end of said housing, wherein along the axis of the tubular housing a vortex extender pin is present.
    Type: Grant
    Filed: July 17, 2003
    Date of Patent: January 19, 2010
    Assignee: Shell Oil Company
    Inventors: Thomas Shawn Dewitz, Hubertus Wilhelmus Albertus Dries, Andreas Ekker, Jan Kater, Richard Addison Sanborn, Alex Christian Hoffmann, Weiming Peng
  • Swirl tube separator
    Publication number: 20060070362
    Abstract: Swirl tube separator for separating solids from a gas-solid containing feed comprising a tubular housing, an inlet for introducing a gas-solids mixture at one end of said housing, a solids outlet opening at the opposite end of said housing, and a co-axial positioned tubular gas outlet conduit placed at an end of said housing, wherein along the axis of the tubular housing a vortex extender pin is present.
    Type: Application
    Filed: July 17, 2003
    Publication date: April 6, 2006
    Inventors: Thomas Dewitz, Hubertus Dries, Andreas Ekker, Jan Kater, Richard Sanborn, Alex Hoffmann, Weiming Peng