Patents by Inventor Jan Noworolski

Jan Noworolski has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Single crystal silicon sensor with high aspect ratio and curvilinear structures and associated method
    Publication number: 20010020726
    Abstract: In one aspect, the invention provides semiconductor sensor which includes a first single crystal silicon wafer layer. A single crystal silicon structure is formed in the first wafer layer. The structure includes two oppositely disposed substantially vertical major surfaces and two oppositely disposed generally horizontal minor surfaces. The aspect ratio of major surface to minor surface is at least 5:1. A carrier which includes a recessed region is secured to the first wafer layer such that said structure is suspended opposite the recessed region.
    Type: Application
    Filed: March 21, 2001
    Publication date: September 13, 2001
    Inventors: Kurt Peterson, Nadim Maluf, Wendell McCulley, John Logan, Erno Klaasen, Jan Noworolski