Patents by Inventor Jan-Peter Engelstaedter
Jan-Peter Engelstaedter has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11538670Abstract: A power converter is capable to convert an electrical input power into a bipolar output power and to deliver the bipolar output power to at least two independent plasma processing chambers. The power converter includes: a power input port for connection to an electrical power delivering grid, at least two, preferably more than two, power output ports each for connection to one of the plasma process chambers, and a controller configured to control the power converter to deliver the bipolar output power to the power output ports, using one or more control parameters selected from a list comprising: power, voltage, current, excitation frequency, and threshold for protective measures, such that at least one of the control parameters at a first power output port is different from the corresponding control parameter at a different power output port.Type: GrantFiled: October 25, 2019Date of Patent: December 27, 2022Assignee: TRUMPF Huettinger Sp. z o. o.Inventors: Jan Peter Engelstaedter, Pawel Ozimek, Krzysztof Ruda, Jakub Swiatnicki
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Patent number: 11430642Abstract: A power converter is capable to convert an electrical input power into a bipolar output power and to deliver the bipolar output power to at least two independent plasma processing chambers. The power converter includes a power input port for connection to an electrical power delivering grid, at least two power output ports each for connection to one of the plasma processing chambers, and a controller configured to control the power converter to deliver the bipolar output power to the power output ports, using at least one of control parameters including power, voltage, current, excitation frequency, and threshold for protective measures. The controller includes a virtual power supply for each power output port, and each virtual power supply includes a separate complete set of all fixed and time varying parameters and internal states associated with the operation of the individual power output port.Type: GrantFiled: October 25, 2019Date of Patent: August 30, 2022Assignee: TRUMPF Huettinger Sp. Z o. o.Inventors: Jan Peter Engelstaedter, Krzysztof Ruda, Jakub Swiatnicki
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Patent number: 10971342Abstract: A power converter is capable to convert an electrical input power into a bipolar output power and to deliver the bipolar output power to at least two independent plasma processing chambers. The power converter includes: a power input port for connection to an electrical power delivering grid, at least two power output ports each for connection to one of the plasma processing chambers, and a controller configured to control delivering the bipolar output power to the power output ports, using at least one control parameter. The controller is configured to obtain a full set of desired values for the control parameter for the power output ports, calculate whether the power converter is capable of delivering every desired value to every output port, and if so, calculate a sequence of pulses of power delivery to the output ports to supply the power to plasma processes in the plasma processing chambers.Type: GrantFiled: October 25, 2019Date of Patent: April 6, 2021Assignee: TRUMPF Huettinger Sp. z o. o.Inventors: Jan Peter Engelstaedter, Moritz Heintze, Jakub Swiatnicki
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Publication number: 20200066498Abstract: A power converter is capable to convert an electrical input power into a bipolar output power and to deliver the bipolar output power to at least two independent plasma processing chambers. The power converter includes: a power input port for connection to an electrical power delivering grid, at least two power output ports each for connection to one of the plasma processing chambers, and a controller configured to control delivering the bipolar output power to the power output ports, using at least one control parameter. The controller is configured to obtain a full set of desired values for the control parameter for the power output ports, calculate whether the power converter is capable of delivering every desired value to every output port, and if so, calculate a sequence of pulses of power delivery to the output ports to supply the power to plasma processes in the plasma processing chambers.Type: ApplicationFiled: October 25, 2019Publication date: February 27, 2020Inventors: Jan Peter Engelstaedter, Moritz Heintze, Jakub Swiatnicki
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Publication number: 20200066497Abstract: A power converter is capable to convert an electrical input power into a bipolar output power and to deliver the bipolar output power to at least two independent plasma processing chambers. The power converter includes a power input port for connection to an electrical power delivering grid, at least two power output ports each for connection to one of the plasma processing chambers, and a controller configured to control the power converter to deliver the bipolar output power to the power output ports, using at least one of control parameters including power, voltage, current, excitation frequency, and threshold for protective measures. The controller includes a virtual power supply for each power output port, and each virtual power supply includes a separate complete set of all fixed and time varying parameters and internal states associated with the operation of the individual power output port.Type: ApplicationFiled: October 25, 2019Publication date: February 27, 2020Inventors: Jan Peter Engelstaedter, Krzysztof Ruda, Jakub Swiatnicki
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Publication number: 20200058475Abstract: A power converter is capable to convert an electrical input power into a bipolar output power and to deliver the bipolar output power to at least two independent plasma processing chambers. The power converter includes: a power input port for connection to an electrical power delivering grid, at least two, preferably more than two, power output ports each for connection to one of the plasma process chambers, and a controller configured to control the power converter to deliver the bipolar output power to the power output ports, using one or more control parameters selected from a list comprising: power, voltage, current, excitation frequency, and threshold for protective measures, such that at least one of the control parameters at a first power output port is different from the corresponding control parameter at a different power output port.Type: ApplicationFiled: October 25, 2019Publication date: February 20, 2020Inventors: Jan Peter Engelstaedter, Pawel Ozimek, Krzysztof Ruda, Jakub Swiatnicki
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Publication number: 20120114003Abstract: A laser device includes a ridge waveguide having an active layer between upper and lower cladding layers. A ridge formed in the upper cladding layer defines the width of a light guiding region in the active layer, and is formed so that a portion of the light guiding region extends into the ridge. A plurality of reflecting slots extend across and into the ridge to a depth sufficient to extend into the extending portion in order that the reflectivity of each slot is on the order of 2%. The slots intersect more than 20% of the total mode energy in the light guiding region, and this in combination with the gain of the active layer facilitates lasing within the light guiding region independently of the reflectivity of end facets of the waveguide. The laser device is particularly suitable for integrally forming with other optical components on a single semiconductor chip.Type: ApplicationFiled: September 16, 2011Publication date: May 10, 2012Applicants: UNIVERSITY COLLEGE CORK, NATIONAL UNIVERSITY OF IRELAND, CORK, UNDIVIDED TRINITY OF QUEEN ELIZABETH, NEAR DUBLINInventors: John F. DONEGAN, Wei-Hua GUO, Qiao-Yin LU, Diarmuid BYRNE, Brian CORBETT, Paul Martin LAMBKIN, Brendan John ROYCROFT, Jan-Peter ENGELSTAEDTER, Frank PETERS
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Publication number: 20100290495Abstract: A laser device (1) comprises a ridge waveguide (2) comprising an upper cladding layer (5) and a lower cladding layer (6), between which is located an active layer (7). A ridge (8) formed in the upper cladding layer (5) defines the lateral width of a light guiding region (9) in the active layer (7). The ridge (8) is formed so that a portion (13) of the light guiding region (9) extends above the active layer (7) into the ridge (8). A plurality of lateral reflecting slots (15) extend laterally across the ridge (8) and extend into the ridge (8) to a depth sufficient to extend into the portion (13) of the light guiding region (9) which extends into the ridge (8) in order that the reflectivity of each lateral slot (15) is in the order of 2%.Type: ApplicationFiled: September 20, 2007Publication date: November 18, 2010Applicants: THE PROVOST, FELLOWS AND SCHOLARS OF THE COLLEGE OF THE HOLY AND UNDIVEDED TRINITY, UNIVERSITY COLLEGE CORK, NATIONAL UNIVERSITY OF IRELAND, CORKInventors: John F. Donegan, Wei-Hua Guo, Qiao-Yin Lu, Diarmuid Byrne, Brian Corbett, Paul Martin Lambkin, Brendan John Roycroft, Jan-Peter Engelstaedter, Frank Peters