Abstract: A method of connecting or disconnecting a first tubular to a second tubular includes engaging the first tubular with a power tong; engaging the second tubular with a backup tong; and rotating the first tubular relative to the second tubular. The method also includes, while rotating, monitoring a distance between the backup tong and the power tong and comparing the distance to a first threshold value; and stopping rotation of the first tubular when the distance equals to the first threshold value. According to one embodiment, a tong assembly includes a power tong, a backup tong, a sensor configured to measure a distance between the power tong and the backup tong, and a controller configured to compare the distance to a threshold value.

Abstract: A method used to determine an operational mode of a tong. The method includes rotating a first sensor target relative to a first sensor and rotating a second sensor target relative to a second sensor. The method also includes identifying a position of the first sensor target using the first sensor and analyzing the position of the first sensor target to determine the operational mode of the tong.

Abstract: A method used to determine an operational mode of a tong. The method includes rotating a first sensor target relative to a first sensor and rotating a second sensor target relative to a second sensor. The method also includes identifying a position of the first sensor target using the first sensor and analyzing the position of the first sensor target to determine the operational mode of the tong.

Abstract: A system for tong assembly operation includes a mode switch for shifting the tong assembly between a first mode of operation and a second mode of operation, the mode switch having a first portion associated with the first mode and a second portion associated with the second mode; a first target coupled to the first portion, the first target movable to a first position corresponding to the first mode of operation; a second target coupled to the second portion, the second target movable to a second position corresponding to the second mode of operation; a first sensor configured to identify the first position of the first target; and a second sensor configured to identify the second position of the second target.

Abstract: A method of connecting or disconnecting a first tubular to a second tubular includes engaging the first tubular with a power tong; engaging the second tubular with a backup tong; and rotating the first tubular relative to the second tubular. The method also includes, while rotating, monitoring a distance between the backup tong and the power tong and comparing the distance to a first threshold value; and stopping rotation of the first tubular when the distance equals to the first threshold value. According to one embodiment, a tong assembly includes a power tong, a backup tong, a sensor configured to measure a distance between the power tong and the backup tong, and a controller configured to compare the distance to a threshold value.

Abstract: A method of connecting or disconnecting a first tubular to a second tubular includes engaging the first tubular with a power tong; engaging the second tubular with a backup tong; and rotating the first tubular relative to the second tubular. The method also includes, while rotating, monitoring a distance between the backup tong and the power tong and comparing the distance to a first threshold value; and stopping rotation of the first tubular when the distance equals to the first threshold value. According to one embodiment, a tong assembly includes a power tong, a backup tong, a sensor configured to measure a distance between the power tong and the backup tong, and a controller configured to compare the distance to a threshold value.

Abstract: A method of connecting or disconnecting a first tubular to a second tubular includes engaging the first tubular with a power tong; engaging the second tubular with a backup tong; and rotating the first tubular relative to the second tubular. The method also includes, while rotating, monitoring a distance between the backup tong and the power tong and comparing the distance to a first threshold value; and stopping rotation of the first tubular when the distance equals to the first threshold value. According to one embodiment, a tong assembly includes a power tong, a backup tong, a sensor configured to measure a distance between the power tong and the backup tong, and a controller configured to compare the distance to a threshold value.

Abstract: A system for tong assembly operation includes a mode switch for shifting the tong assembly between a first mode of operation and a second mode of operation, the mode switch having a first portion associated with the first mode and a second portion associated with the second mode; a first target coupled to the first portion, the first target movable to a first position corresponding to the first mode of operation; a second target coupled to the second portion, the second target movable to a second position corresponding to the second mode of operation; a first sensor configured to identify the first position of the first target; and a second sensor configured to identify the second position of the second target.

Abstract: A tong assembly includes a power tong, a backup tong, and a carriage assembly operatively connecting the power tong and the backup tong. The carriage assembly includes a movable trolley assembly. The movable trolley assembly is axially located between the power tong and the backup tong. The movable trolley assembly is supported by the power tong. The movable trolley assembly is configured to axially move the power tong and backup tong relative to each other.

Abstract: A tong assembly includes a power tong, a backup tong, and a carriage assembly operatively connecting the power tong and the backup tong. The carriage assembly includes a movable trolley assembly. The movable trolley assembly is axially located between the power tong and the backup tong. The movable trolley assembly is supported by the power tong. The movable trolley assembly is configured to axially move the power tong and backup tong relative to each other.

Abstract: A method and system of semiconductor fabrication are provided. In the method, an equipment unit performs a process on substrates to form processed substrates. The equipment unit also communicates processing data to a local scheduler. The local scheduler schedules removal of processed substrates from the equipment unit and delivery of unprocessed substrates to the equipment unit based on the processing data.

Abstract: A method includes designating a plurality of wafers as members of a group. A first subset of the wafers is housed in a first wafer pod and a second subset of the wafers is housed in a second wafer pod. The first wafer pod is routed to a first tool, and at least a first operation is performed on the wafers in the first subset using the first tool. The second wafer pod is routed to a second tool, and the first operation is performed on the wafers in the second subset using the second tool. The wafers in the first and second subsets are consolidated following the performing of the first operation.

Abstract: By providing an overhead buffer system between an automatic transport system and a load port assembly of a process tool, the efficiency of the respective load ports may be significantly enhanced, for instance, by reducing the idle time of empty carriers, thereby providing the potential for covering a wider range of operational scenarios compared to conventional strategies. For instance, for the same number of load ports, the overhead buffer system may provide a continuous operation, even if small lot sizes are used. The buffer system may comprise a dedicated transport mechanism for directly serving the load ports and respective buffer places, while respective transfer places may provide direct interaction with the automated transport system.

Abstract: By providing an under-specified specification for designating a destination carrier in a respective control job or control message, a high degree of flexibility in determining the destination of processed substrates may be obtained, thereby also allowing the removal of a source carrier for enhancing load port availability in complex semiconductor facilities.

Abstract: By providing an overhead buffer system between an automatic transport system and a load port assembly of a process tool, the efficiency of the respective load ports may be significantly enhanced, for instance, by reducing the idle time of empty carriers, thereby providing the potential for covering a wider range of operational scenarios compared to conventional strategies. For instance, for the same number of load ports, the overhead buffer system may provide a continuous operation, even if small lot sizes are used. The buffer system may comprise a dedicated transport mechanism for directly serving the load ports and respective buffer places, while respective transfer places may provide direct interaction with the automated transport system.

Abstract: By providing an under-specified specification for designating a destination carrier in a respective control job or control message, a high degree of flexibility in determining the destination of processed substrates may be obtained, thereby also allowing the removal of a source carrier for enhancing load port availability in complex semiconductor facilities.

Abstract: By analyzing process messages exchanged between one or more process tools and a remote host system, the status of the communication may be efficiently monitored. The analysis of the respective process messages may allow interpretation of process messages so as to have increased intelligibility, wherein additionally the process messages may be classified in accordance with one or more predefined criteria. Thus, the detection of even subtle communication inefficiencies may be significantly enhanced.