Patents by Inventor Jan Skalicky

Jan Skalicky has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System and method for beam position visualization
    Patent number: 10998166
    Abstract: A charged-particle beam (CPB) is aligned to a primary axis of a CPB microscope by determining a first beam deflection drive to a beam deflector for directing the CPB passing a reference location displaced from the primary axis. The beam deflector is provided with a second beam deflection drive during the working mode of the CPB microscope to propagate the beam along the primary axis. The second beam deflection drive is determined based on the first beam deflection drive.
    Type: Grant
    Filed: December 12, 2019
    Date of Patent: May 4, 2021
    Assignee: FEI Company
    Inventors: Branislav Straka, Radek Smolka, Lukas Kral, Jan Skalicky
  • SYSTEM AND METHOD FOR BEAM POSITION VISUALIZATION
    Publication number: 20210035775
    Abstract: A charged-particle beam (CPB) is aligned to a primary axis of a CPB microscope by determining a first beam deflection drive to a beam deflector for directing the CPB passing a reference location displaced from the primary axis. The beam deflector is provided with a second beam deflection drive during the working mode of the CPB microscope to propagate the beam along the primary axis. The second beam deflection drive is determined based on the first beam deflection drive.
    Type: Application
    Filed: December 12, 2019
    Publication date: February 4, 2021
    Applicant: FEI Company
    Inventors: Branislav Straka, Radek Smolka, Lukas Kral, Jan Skalicky