Abstract: An analysis of the defects of a structured component includes a check of a local deviation between an actual structure dimension of the component and a target structure dimension of the component. In this context, the local deviation is checked at a location of a test path along a deviation coordinate which extends across the test path. The test is repeated at a plurality of different test path locations within a test region of the test path. A summed local deviation between the actual structure dimension and the target structure dimension over the test region is determined. The local deviation is compared with a local deviation tolerance value. The summed local deviation is compared with a summation deviation tolerance value. This results in a defect analysis with enhanced significance, which is implementable using a metrology system in particular.

Abstract: A device for recognizing functional units in an electrical system, which is one of being optional and provided in different construction stages, respectively, comprising a data processing unit and at least one functional unit, the functional unit having a function register with a nonvolatile memory for holding function data, the memory having at least one function entry with function data associated with the physical properties of the functional unit, a change in the properties of the functional unit being recordable by changing the corresponding function data of the function entry in the function register; and a method of operating the device.

Abstract: A device for recognizing functional units in an electrical system, which is one of being optional and provided in different construction stages, respectively, comprising a data processing unit and at least one functional unit, the functional unit having a function register with a nonvolatile memory for holding function data, the memory having at least one function entry with function data associated with the physical properties of the functional unit, a change in the properties of the functional unit being recordable by changing the corresponding function data of the function entry in the function register; and a method of operating the device.