Patents by Inventor Jan van Burken

Jan van Burken has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Camera-aided focusing in optical metrology
    Patent number: 9215425
    Abstract: A side camera is combined with a conventional optical metrology system to image the object during the focusing scan performed in normal focusing procedures. The camera is positioned in fixed spatial relation to the objective and with its focal plane in substantial alignment with the optical axis of the objective so as to image the object during the scan. The camera is used to monitor the illumination spot formed on the object by the beam projected through the system's objective. The in-focus position is found by moving the object such that the illumination spot coincides with the objective's focus seen through the camera.
    Type: Grant
    Filed: February 4, 2013
    Date of Patent: December 15, 2015
    Assignee: BRUKER NANO INC.
    Inventors: Colin Farrell, Jan van Burken