Patents by Inventor Jan Van Eljk

Jan Van Eljk has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic device with a suspended object table
    Patent number: 5150153
    Abstract: A lithographic device with a lithographic irradiation system (1, 13) which is fastened near a lower side to a mounting member (5) of a frame (7). The device is provided with a unit (65) which is formed by a positioning device (37), with which an object table (21) arranged below the irradiation system (1, 13) is displaceable, and by a support member (35), over which the object table (21) is guided by means of an aerostatic foot (31). In an operational position, the unit (65) is coupled to a carrier (67) by means of coupling members (73), the carrier (67) being suspended from the mounting member (5) by means of suspension elements (79, 81, 83), so that the unit (65) is arranged between lower frame supports (25) of the frame (7) and a compact construction is obtained.The unit (65) can be rotated from the operational position to an end position, in which the unit (65) is entirely outside the frame (7) and is easily accessible for maintenance, by means of a rotation mechanism (87) and a swivel mechanism (89).
    Type: Grant
    Filed: December 10, 1991
    Date of Patent: September 22, 1992
    Assignee: U.S. Philips Corp.
    Inventors: Dominicus J. Franken, Fransiscus M. Jacobs, Johannes M. M. Van Kimmenade, Cornelis D. Van Dijk, Jan Van Eljk