Patents by Inventor Jan Willem Hubert Maes

Jan Willem Hubert Maes has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and installation for etching a substrate
    Patent number: 6884317
    Abstract: Method for etching a substrate wherein, after placing in an etching chamber, said substrate is treated with a mixture of HF and acetic acid. Acetic acid is introduced into the chamber first, followed by the hydrogen fluoride. Hydrogen fluoride is introduced via an intermediate stage during which the hydrogen fluoride is stored in an auxiliary chamber. By this means back-flow of a corrosive mixture consisting of hydrogen fluoride and acetic acid into the piping assembly for hydrogen fluoride is prevented and, thus, the life of the piping assembly concerned is appreciably prolonged and metal contamination on substrate treated later is prevented.
    Type: Grant
    Filed: January 29, 2001
    Date of Patent: April 26, 2005
    Assignee: ASM International, N.V.
    Inventors: Hessel Sprey, Arjen Benjamin Storm, Jan Willem Hubert Maes
  • Method and installation for etching a substrate
    Publication number: 20010015343
    Abstract: Method for etching a substrate wherein, after placing in an etching chamber, said substrate is treated with a mixture of HF and acetic acid. Acetic acid is introduced into the chamber first, followed by the hydrogen fluoride. Hydrogen fluoride is introduced via an intermediate stage during which the hydrogen fluoride is stored in an auxiliary chamber. By this means back-flow of a corrosive mixture consisting of hydrogen fluoride and acetic acid into the piping assembly for hydrogen fluoride is prevented and, thus, the life of the piping assembly concerned is appreciably prolonged and metal contamination on substrate treated later is prevented.
    Type: Application
    Filed: January 29, 2001
    Publication date: August 23, 2001
    Inventors: Hessel Sprey, Arjen Benjamin Storm, Jan Willem Hubert Maes