Patents by Inventor Jana Clerico

Jana Clerico has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Characterization with picosecond ultrasonics of metal portions of samples potentially subject to erosion
    Patent number: 8312772
    Abstract: A method for evaluating a manufacturing process is described. The method includes generating an optical pump beam pulse and directing the optical pump beam pulse to a surface of a sample. A probe pulse is generated and directed the probe pulse to the surface of the sample. A probe pulse response signal is detected. A change in the probe pulse varying in response to the acoustic signal forms the probe pulse response signal. An evaluation of one or more manufacturing process steps used to create the sample is made based upon the probe pulse response signal. Additionally the method may be used for process control of a CMP process. Apparatus are also described.
    Type: Grant
    Filed: February 28, 2008
    Date of Patent: November 20, 2012
    Assignee: Rudolph Technologies, Inc.
    Inventors: Guray Tas, Sean P. Leary, Dario Alliata, Jana Clerico, Priya Mukundhan, Zhongning Dai
  • CHARACTERIZATION WITH PICOSECOND ULTRASONICS OF METAL PORTIONS OF SAMPLES POTENTIALLY SUBJECT TO EROSION
    Publication number: 20100281981
    Abstract: A method for evaluating a manufacturing process is described. The method includes generating an optical pump beam pulse and directing the optical pump beam pulse to a surface of a sample. A probe pulse is generated and directed the probe pulse to the surface of the sample. A probe pulse response signal is detected. A change in the probe pulse varying in response to the acoustic signal forms the probe pulse response signal. An evaluation of one or more manufacturing process steps used to create the sample is made based upon the probe pulse response signal. Additionally the method may be used for process control of a CMP process. Apparatus are also described.
    Type: Application
    Filed: February 28, 2008
    Publication date: November 11, 2010
    Inventors: Guray Tas, Sean P. Leary, Dario Alliata, Jana Clerico, Priya Mukundhan, Zhongning Dai