Patents by Inventor Jane Rekstad

Jane Rekstad has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Saw debris reduction in MEMS devices
    Patent number: 7977786
    Abstract: An improved MEMS device and method of making. Channels are formed in a first substrate around a plurality of MEMS device areas previously formed on the first substrate. Then, a plurality of seal rings are applied around the plurality of MEMS device areas and over at least a portion of the formed channels. A second substrate is attached to the first substrate, then the seal ring surrounded MEMS device areas are separated from each other. The channels include first and second cross-sectional areas. The first cross-sectional area is sized to keep saw debris particles from entering the MEMS device area.
    Type: Grant
    Filed: July 25, 2008
    Date of Patent: July 12, 2011
    Assignee: Honeywell International Inc.
    Inventors: Jeff A. Ridley, Max Glenn, James C. Nohava, Robert D. Horning, Jane Rekstad
  • SAW DEBRIS REDUCTION IN MEMS DEVICES
    Publication number: 20100019364
    Abstract: An improved MEMS device and method of making. Channels are formed in a first substrate around a plurality of MEMS device areas previously formed on the first substrate. Then, a plurality of seal rings are applied around the plurality of MEMS device areas and over at least a portion of the formed channels. A second substrate is attached to the first substrate, then the seal ring surrounded MEMS device areas are separated from each other. The channels include first and second cross-sectional areas. The first cross-sectional area is sized to keep saw debris particles from entering the MEMS device area.
    Type: Application
    Filed: July 25, 2008
    Publication date: January 28, 2010
    Applicant: HONEYWELL INTERNATIONAL INC.
    Inventors: Jeff A. Ridley, Max Glenn, James C. Nohava, Robert D. Horning, Jane Rekstad