Patents by Inventor Janet Yi

Janet Yi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Operational lists for simultaneous wafer scheduling and system event scheduling
    Patent number: 6889110
    Abstract: A scheduler handles the various tasks to be performed on a wafer processing system as operations, with each operation having a predefined data structure. Operations that meet a set of requirements are added to an operation list. In the operation list, operations meeting another set of requirements are switched to the active state. Each active operation in the operation list is scheduled to run on the wafer processing system. Using structured operations to perform various tasks improves the extensibility and maintainability of the present scheduler. Further, the present scheduler can schedule several compatible operations at the same time by going through each operation in the operation list, and running those that are in the active state.
    Type: Grant
    Filed: September 29, 2000
    Date of Patent: May 3, 2005
    Assignee: Novellus Systems, Inc.
    Inventors: Jaideep Jain, Stanley P. Liu, Janet Yi, Eileen A. H. Wong, Sofya B. Malitsky, Thomas Hentschel