Patents by Inventor Jang HEO

Jang HEO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • CONTAINER FOR STORING WAFER
    Publication number: 20230307276
    Abstract: The present invention relates to a container for storing a wafer, particularly to a container for storing a wafer in which a plurality of purging areas is vertically partitioned in the interior of a storage chamber, and a purge gas is sprayed into the plurality of purging areas, thereby allowing not only uniform purging of the wafer to be assured but also efficient purging of the wafer without waste of the purge gas to be achieved.
    Type: Application
    Filed: June 1, 2023
    Publication date: September 28, 2023
    Inventors: Bum Je WOO, Seok Mun YOON, Jang HEO, Young Chul KIM
  • Container for storing wafer
    Patent number: 11710651
    Abstract: The present invention relates to a container for storing a wafer, particularly to a container for storing a wafer in which a plurality of purging areas is vertically partitioned in the interior of a storage chamber, and a purge gas is sprayed into the plurality of purging areas, thereby allowing not only uniform purging of the wafer to be assured but also efficient purging of the wafer without waste of the purge gas to be achieved.
    Type: Grant
    Filed: April 30, 2021
    Date of Patent: July 25, 2023
    Assignees: PICO & TERA CO., LTD.
    Inventors: Bum Je Woo, Seok Mun Yoon, Jang Heo, Young Chul Kim
  • CONTAINER FOR STORING WAFER
    Publication number: 20210257240
    Abstract: The present invention relates to a container for storing a wafer, particularly to a container for storing a wafer in which a plurality of purging areas is vertically partitioned in the interior of a storage chamber, and a purge gas is sprayed into the plurality of purging areas, thereby allowing not only uniform purging of the wafer to be assured but also efficient purging of the wafer without waste of the purge gas to be achieved.
    Type: Application
    Filed: April 30, 2021
    Publication date: August 19, 2021
    Inventors: Bum Je WOO, Seok Mun YOON, Jang HEO, Young Chul KIM
  • Container for storing wafer
    Patent number: 11075100
    Abstract: The present invention relates to a container for storing a wafer, particularly to a container for storing a wafer in which a plurality of purging areas is vertically partitioned in the interior of a storage chamber, and a purge gas is sprayed into the plurality of purging areas, thereby allowing not only uniform purging of the wafer to be assured but also efficient purging of the wafer without waste of the purge gas to be achieved.
    Type: Grant
    Filed: June 26, 2017
    Date of Patent: July 27, 2021
    Assignees: PICO & TERA CO., LTD.
    Inventors: Bum Je Woo, Seok Mun Yoon, Jang Heo, Young Chul Kim
  • CONTAINER FOR STORING WAFER
    Publication number: 20190311929
    Abstract: The present invention relates to a container for storing a wafer, particularly to a container for storing a wafer in which a plurality of purging areas is vertically partitioned in the interior of a storage chamber, and a purge gas is sprayed into the plurality of purging areas, thereby allowing not only uniform purging of the wafer to be assured but also efficient purging of the wafer without waste of the purge gas to be achieved.
    Type: Application
    Filed: June 26, 2017
    Publication date: October 10, 2019
    Inventors: Bum Je WOO, Seok Mun YOON, Jang HEO, Young Chul KIM