Abstract: An energy storage module includes: a cover member including an internal receiving space configured to accommodate battery cells each including a vent; a top plate coupled to a top of the cover member and including ducts respectively corresponding to the vents of the battery cells; a top cover coupled to a top portion of the top plate and including discharge holes located in an exhaust area and respectively corresponding to the ducts; and an extinguisher sheet located between the top cover and the top plate, and configured to emit a fire extinguishing agent at a temperature exceeding a certain temperature, and the top cover includes protrusion parts located on a bottom surface of the top cover, covering the exhaust area, and coupled to an exterior of the ducts.

Abstract: An energy storage module includes a plurality of battery cells, each including a vent; a plurality of insulation spacers, at least one of the insulation spacers being located between long side surfaces of each adjacent pair of the battery cells; a cover member including an internal receiving space; a top plate coupled to a top portion of the cover member and including ducts respectively corresponding to the vents of the battery cells, and opening holes respectively corresponding to the insulation spacers; a top cover coupled to a top portion of the top plate and including discharge holes respectively corresponding to the ducts; and an extinguisher sheet located between the top cover and the top plate, configured to emit a fire extinguishing agent at a temperature exceeding a certain temperature, and including opening holes positioned to correspond to the ducts.

Abstract: An energy storage module includes: a cover member accommodating a plurality of battery cells in an internal receiving space, each of the battery cells including a vent; a top plate coupled to a top of the cover member and including a duct corresponding to the vent of at least one of the battery cells; a top cover coupled to a top of the top plate and having an exhaust area corresponding to the duct, the exhaust area having a plurality of discharge openings, the top cover including a protrusion protruding from a bottom surface of the top cover, the protrusion extending around a periphery of the exhaust area and around a distal end of the duct; and an extinguisher sheet between the top cover and the top plate, the extinguisher sheet being configured to emit a fire extinguishing agent at a reference temperature.

Abstract: A method of manufacturing a semiconductor device includes forming a first lower overlay key including first and second patterns in a lower layer, forming a first upper overlay key including third and fourth patterns in an upper layer vertically disposed on the lower layer, irradiating a first measurement light to a first region of interest (ROI) over first portions of the first and second patterns to detect a first overlay error and irradiating a second measurement light to a second ROI over second portions of the first and second patterns, the second ROI being different from the first ROI, to detect a second overlay error.

Abstract: An energy storage module includes: a plurality of battery cells arranged in a first direction such that long side surfaces of adjacent ones of the battery cells face one another; a plurality of insulation spacers, at least one of the insulation spacers being between each adjacent pair of the battery cells, each of the insulation spacers including a heat-insulating first sheet and a plurality of flame-retardant second sheets respectively adhered to opposite surfaces of the first sheet by an adhesion member; a cover member including an internal receiving space configured to accommodate the battery cells and the insulation spacers; a top plate coupled to the cover member, the top plate including ducts respectively corresponding to vents of the battery cells and having fire extinguishing agent openings respectively corresponding to the insulation spacers; a top cover coupled to the top plate and having discharge openings respectively corresponding to the ducts; and an extinguisher sheet between the top cover and

Abstract: An energy storage module includes: a plurality of battery cells arranged in a length direction; a plurality of insulation spacers; a cover member including an internal receiving space; a top plate coupled to a top of the cover member, the top plate including ducts respectively corresponding to vents of the battery cells and having opening holes respectively corresponding to the insulation spacers; a top cover coupled to a top of the top plate and having discharge holes respectively corresponding to the ducts; and an extinguisher sheet between the top cover and the top plate, the extinguisher sheet being configured to emit a fire extinguishing agent at a temperature exceeding a reference temperature, the top cover including protrusion parts on a bottom surface thereof, the protrusion parts covering an exhaust region and being coupled to an exterior of each of the ducts.

Abstract: A method of manufacturing a semiconductor device includes forming a mold layer on a semiconductor wafer having a plurality of integrated circuit die at least partially defined therein. An etch stopper film is selectively formed on a second portion of the mold layer extending adjacent a periphery of the semiconductor wafer, but not on a first portion of the mold layer extending opposite at least one of the plurality of integrated circuit die. A preliminary pattern layer is formed on the etch stopper film and on the first portion of the mold layer. A plurality of patterns are formed in the preliminary pattern layer by selectively exposing the preliminary pattern layer to extreme ultraviolet light (EUV). Then, hole patterns are selectively formed in the first portion of the mold layer, using the exposed preliminary pattern layer and the etch stopper film as an etching mask.

Abstract: Provided is a molten material treatment apparatus including: a container having an upper portion, on which a molten material injection part is disposed, and a bottom part in which a hole is formed; a gas injection part attached to the bottom part between the molten material injection part and the hole; a chamber part formed on the upper portion of the container so as to face the gas injection part and having an inside open downward; and a plurality of vertical members disposed so as to cross a plurality of positions of a rotary flow region formed between the chamber part and the bottom part, wherein an inclusion removal efficiency can be improved while maintaining the molten material surface by a method in which a plurality of mutually different rotary flows are generated in a plurality of sections within the rotary flow region and are partially overlapped.

Abstract: An energy storage module includes: a plurality of battery cells arranged in a length direction; a plurality of insulation spacers; a cover member including an internal receiving space; a top plate coupled to a top of the cover member, the top plate including ducts respectively corresponding to vents of the battery cells and having opening holes respectively corresponding to the insulation spacers; a top cover coupled to a top of the top plate and having discharge holes respectively corresponding to the ducts; and an extinguisher sheet between the top cover and the top plate, the extinguisher sheet being configured to emit a fire extinguishing agent at a temperature exceeding a reference temperature, the top cover including protrusion parts on a bottom surface thereof, the protrusion parts covering an exhaust region and being coupled to an exterior of each of the ducts.

Abstract: An energy storage module includes: a plurality of battery cells arranged in a length direction, each of the battery cells including a vent; a plurality of insulation spacers, at least one of the insulation spacers being located between long side surfaces of an adjacent pair of the battery cells; a cover member; a top plate coupled to a top portion of the cover member and including ducts respectively corresponding to the vents of the battery cells and including opening holes respectively corresponding to the insulation spacers; a top cover coupled to a top portion of the top plate and including discharge holes located in an exhaust area and respectively corresponding to the ducts; and an extinguisher sheet located between the top cover and the top plate, configured to emit a fire extinguishing agent at a temperature exceeding a certain temperature and including opening holes located to correspond to the ducts.

Abstract: An energy storage module includes: a cover member including an internal receiving space configured to accommodate battery cells each including a vent; a top plate coupled to a top of the cover member and including ducts respectively corresponding to the vents of the battery cells; a top cover coupled to a top portion of the top plate and including discharge holes located in an exhaust area and respectively corresponding to the ducts; and an extinguisher sheet located between the top cover and the top plate, and configured to emit a fire extinguishing agent at a temperature exceeding a certain temperature, and the top cover includes protrusion parts located on a bottom surface of the top cover, covering the exhaust area, and coupled to an exterior of the ducts.

Abstract: An energy storage module includes: a plurality of battery cells arranged in a length direction; a plurality of insulation spacers; a cover member including an internal receiving space; a top plate coupled to a top of the cover member, the top plate including ducts respectively corresponding to vents of the battery cells and having opening holes respectively corresponding to the insulation spacers; a top cover coupled to a top of the top plate and having discharge holes respectively corresponding to the ducts; and an extinguisher sheet between the top cover and the top plate, the extinguisher sheet being configured to emit a fire extinguishing agent at a temperature exceeding a reference temperature, the top cover including protrusion parts on a bottom surface thereof, the protrusion parts covering an exhaust region and being coupled to an exterior of each of the ducts.

Abstract: An energy storage module includes: a cover member accommodating a plurality of battery cells in an internal receiving space, each of the battery cells including a vent; a top plate coupled to a top of the cover member and including a duct corresponding to the vent of at least one of the battery cells; a top cover coupled to a top of the top plate and having an exhaust area corresponding to the duct, the exhaust area having a plurality of discharge openings, the top cover including a protrusion protruding from a bottom surface of the top cover, the protrusion extending around a periphery of the exhaust area and around a distal end of the duct; and an extinguisher sheet between the top cover and the top plate, the extinguisher sheet being configured to emit a fire extinguishing agent at a reference temperature.

Abstract: An energy storage module includes: a plurality of battery cells arranged in a first direction such that long side surfaces of adjacent ones of the battery cells face one another; a plurality of insulation spacers, at least one of the insulation spacers being between each adjacent pair of the battery cells, each of the insulation spacers including a heat-insulating first sheet and a plurality of flame-retardant second sheets respectively adhered to opposite surfaces of the first sheet by an adhesion member; a cover member including an internal receiving space configured to accommodate the battery cells and the insulation spacers; a top plate coupled to the cover member, the top plate including ducts respectively corresponding to vents of the battery cells and having fire extinguishing agent openings respectively corresponding to the insulation spacers; a top cover coupled to the top plate and having discharge openings respectively corresponding to the ducts; and an extinguisher sheet between the top cover and

Abstract: An energy storage module includes: a plurality of battery cells arranged in a length direction; a plurality of insulation spacers; a cover member including an internal receiving space; a top plate coupled to a top of the cover member, the top plate including ducts respectively corresponding to vents of the battery cells and having opening holes respectively corresponding to the insulation spacers; a top cover coupled to a top of the top plate and having discharge holes respectively corresponding to the ducts; and an extinguisher sheet between the top cover and the top plate, the extinguisher sheet being configured to emit a fire extinguishing agent at a temperature exceeding a reference temperature, the top cover including protrusion parts on a bottom surface thereof, the protrusion parts covering an exhaust region and being coupled to an exterior of each of the ducts.

Abstract: An energy storage module includes a plurality of battery cells, each including a vent; a plurality of insulation spacers, at least one of the insulation spacers being located between long side surfaces of each adjacent pair of the battery cells; a cover member including an internal receiving space; a top plate coupled to a top portion of the cover member and including ducts respectively corresponding to the vents of the battery cells, and opening holes respectively corresponding to the insulation spacers; a top cover coupled to a top portion of the top plate and including discharge holes respectively corresponding to the ducts; and an extinguisher sheet located between the top cover and the top plate, configured to emit a fire extinguishing agent at a temperature exceeding a reference temperature, and including opening holes positioned to correspond to the ducts.

Abstract: An energy storage module includes: a plurality of battery cells arranged in a first direction such that long side surfaces of adjacent ones of the battery cells face one another; a plurality of insulation spacers, at least one of the insulation spacers being between each adjacent pair of the battery cells, each of the insulation spacers including a heat-insulating first sheet and a plurality of flame-retardant second sheets respectively adhered to opposite surfaces of the first sheet by an adhesion member; a cover member including an internal receiving space configured to accommodate the battery cells and the insulation spacers; a top plate coupled to the cover member, the top plate including ducts respectively corresponding to vents of the battery cells and having fire extinguishing agent openings respectively corresponding to the insulation spacers; a top cover coupled to the top plate and having discharge openings respectively corresponding to the ducts; and an extinguisher sheet between the top cover and

Abstract: An energy storage module includes a plurality of battery cells, each including a vent; a plurality of insulation spacers, at least one of the insulation spacers being located between long side surfaces of each adjacent pair of the battery cells; a cover member including an internal receiving space; a top plate coupled to a top portion of the cover member and including ducts respectively corresponding to the vents of the battery cells, and opening holes respectively corresponding to the insulation spacers; a top cover coupled to a top portion of the top plate and including discharge holes respectively corresponding to the ducts; and an extinguisher sheet located between the top cover and the top plate, configured to emit a fire extinguishing agent at a temperature exceeding a certain temperature, and including opening holes positioned to correspond to the ducts.

Abstract: An energy storage module includes: a cover member including an internal receiving space configured to accommodate battery cells each including a vent; a top plate coupled to a top of the cover member and including ducts respectively corresponding to the vents of the battery cells; a top cover coupled to a top portion of the top plate and including discharge holes located in an exhaust area and respectively corresponding to the ducts; and an extinguisher sheet located between the top cover and the top plate, and configured to emit a fire extinguishing agent at a temperature exceeding a reference temperature, and the top cover includes protrusion parts located on a bottom surface of the top cover, covering the exhaust area, and coupled to an exterior of the ducts.

Abstract: An energy storage module includes: a plurality of battery cells arranged in a length direction, each of the battery cells including a vent; a plurality of insulation spacers, at least one of the insulation spacers being located between long side surfaces of an adjacent pair of the battery cells; a cover member; a top plate coupled to a top portion of the cover member and including ducts respectively corresponding to the vents of the battery cells and including opening holes respectively corresponding to the insulation spacers; a top cover coupled to a top portion of the top plate and including discharge holes located in an exhaust area and respectively corresponding to the ducts; and an extinguisher sheet located between the top cover and the top plate, configured to emit a fire extinguishing agent at a temperature exceeding a certain temperature and including opening holes located to correspond to the ducts.