Abstract: A tactile ultrasonic device and a method of processing a user input by using the same. The tactile ultrasonic device may include a plurality of ultrasonic elements including a first ultrasonic element and a second ultrasonic element, which are placed such that beam axes are not parallel to each other. The tactile ultrasonic device may also include a processor that controls vibrations of the ultrasonic elements. A first focus of the first ultrasonic element and a second focus of the second ultrasonic element may be formed within a specific range of a tactile sensing area.

Abstract: A substrate processing apparatus is provided and includes: a support unit including a spin chuck and a centering jig that is on the spin chuck, the spin chuck configured to support and rotate a substrate; a spraying unit configured to spray processing liquid onto the substrate; a swing arm including a correction unit that includes a sensor and an emitter, the swing arm configured to move such that the correction unit moves to a target point on the substrate, and the emitter configured to irradiate a beam towards the substrate; and a controller configured to: control the spin chuck and the swing arm; and determine whether a movement trajectory of the swing arm is aligned with a rotation center of the spin chuck based on information acquired by the sensor about the centering jig.

Abstract: An embodiment contact combustion type hydrogen sensor includes a substrate including silicon, lamination layers disposed over a top surface of the substrate and including a first thin oxide layer and a first thin nitride layer, a heater over the lamination layers, the heater including a connecting part electrically connected to a predetermined part and a heating part configured to be heated in response to power being applied, insulating layers covering a top surface of the heater and configured to perform an insulating operation, the insulating layers including a second thin oxide layer and a second thin nitride layer, a platinum catalyst over the insulating layers and configured to be heated by the heater to perform a hydrogen reaction, and a slit outside the heating part and passing through the substrate and the lamination layers.

Abstract: Provided is a control device and a substrate processing apparatus including the same. The substrate processing apparatus includes a support unit configured to support and rotate a first substrate, the support unit including a spin chuck, a spray unit configured to spray a processing fluid on the first substrate, a correction unit on a swing arm and configured to irradiate a beam onto the first substrate when the processing fluid is provided on the first substrate, wherein the swing arm is adjacent to the spin chuck and is configured to move the correction unit to a target point on the first substrate, and a controller configured to control the spin chuck and the swing arm, and correct a position error of the swing arm using a second substrate, wherein a plurality of anchor patterns are on the second substrate.

Abstract: A control device and a substrate processing apparatus including the same are provided. The substrate processing apparatus includes: a support unit including a spin head and configured to support and to rotate a substrate; a spraying unit configured to spray processing liquid onto the substrate; a correction unit in a swing arm, the correction unit configured to move to a target point on the substrate and to irradiate a beam when the processing liquid is sprayed onto the substrate; and a control unit configured to calculate the target point, wherein the control unit is configured to convert image coordinates associated with a first coordinate system and then to calculate the target point by converting the image coordinates associated with the first coordinate system into image coordinates associated with a second coordinate system, and the second coordinate system is based on rotation angles of the spin head and the swing arm.

Abstract: A non-contact interface device for a vehicle and a method for controlling the same, may display an operation system menu for a driver and passengers to operate various kinds of devices of the vehicle as a hologram, enable a user to operate the displayed operation system menu in a non-contact manner by use of the user's finger or the like, and provide the user with a tactile feedback for a non-contact operation, so that the user can recognize whether to have operated the menu.

Abstract: An embodiment multi-directional vibration energy harvester includes a fixing part in which fixed discs of a conductive material are stacked spaced apart from each other and electrically connected to each other and a vibration unit in which vibration discs are arranged to be spaced apart from each other with the vibration discs being alternately stacked with the fixed discs, wherein the fixed discs and the vibration discs are arranged so that as an arrangement distance between a vibration disc of the vibration discs and a fixed disc of the fixed discs is changed by an external force, an electron moves between the vibration disc and the fixed disc.

Abstract: An energy harvester includes an electrode part including a plurality of partition walls spaced apart from one another in a horizontal direction, and spaces defined between the plurality of partition walls, and a cantilever part including a cantilever member having at least a partial region provided in the space defined in the electrode part, the cantilever member includes a plurality of cantilever members, each of the plurality of cantilever members having a first end and a second end, wherein the first end is positioned in the space defined in the electrode part, and wherein the second end is fixedly coupled to a housing, and in which a natural frequency of at least one of the plurality of cantilever members is different from a natural frequency of each of the remaining cantilever members.

Abstract: In accordance with an embodiment, an omnidirectional energy harvester device includes: a harvesting member including an electrode pad having a first electrode disposed on an upper surface of the electrode pad, and a friction pad spaced apart from the electrode pad and having a second electrode disposed on an upper surface of the friction pad; and a vortex-induced vibration column fixedly coupled to the harvesting member at a lower surface of the vortex-induced vibration column. The vortex-induced vibration column is configured to generate vibration by an external force at an upper portion of the vortex-induced vibration column, wherein the first electrode disposed on the electrode pad and the second electrode disposed on the friction pad are electrically connected.

Abstract: Disclosed herein is a method for manufacturing a hydrogen sensor, the method comprising the steps of: disposing a thin film made of a transition metal or an alloy thereof on a surface of elastic substrate; applying a tensile force in a repetitive manner to the elastic substrate to form a nanocrack on the thin film disposed on the surface of the elastic substrate; and injecting hydrogen gas into the formed nanocrack and then removing the hydrogen gas to form a nanogap, wherein the tensile force in the step of forming a nanocrack is applied to an extent that the elastic substrate has a tensile strain of 25% to 100%.

Abstract: An apparatus for providing haptic stimulation includes an ultrasonic actuator configured to provide haptic stimulation to a part of a body located at a target location by generating an ultrasonic signal, and forming sound pressure at the target location via the generated ultrasonic signal; an object sensor provided around the ultrasonic actuator and configured to detect an object within a region between the ultrasonic actuator and the target location; and a control module configured to stop operation of the ultrasonic actuator based on detecting the object within the region is sensed.

Abstract: A convertible seat for a vehicle includes a base frame having a predetermined dimension of storage space, a plurality of individual blocks disposed to be ascendable and descendable in the storage space of the base frame and configured to serve as a seatback and a seat cushion, and a raising and lowering drive device installed in each of the individual blocks and configured to raise or lower a corresponding one of the individual blocks so that a seat position can be changed into various forms.

Abstract: Disclosed is a micro gas chromatography system including a fluid feeder for feeding a fluid composed of a carrier gas and a gas mixture containing an analyte component to the next stage, a micro gas preconcentrator chip configured to concentrate and desorb the analyte component contained in the fluid, a micro gas chromatography chip including a micro separation column for separating the analyte component concentrated and desorbed by the micro gas preconcentrator chip, and a micro sensing unit including a micro thermal conductivity detection sensor configured to detect the analyte component separated by the micro gas chromatography chip.

Abstract: An embodiment multi-directional vibration energy harvester includes a fixing part in which fixed discs of a conductive material are stacked spaced apart from each other and electrically connected to each other and a vibration unit in which vibration discs are arranged to be spaced apart from each other with the vibration discs being alternately stacked with the fixed discs, wherein the fixed discs and the vibration discs are arranged so that as an arrangement distance between a vibration disc of the vibration discs and a fixed disc of the fixed discs is changed by an external force, an electron moves between the vibration disc and the fixed disc.

Abstract: In accordance with an embodiment, an omnidirectional energy harvester device includes: a harvesting member including an electrode pad having a first electrode disposed on an upper surface of the electrode pad, and a friction pad spaced apart from the electrode pad and having a second electrode disposed on an upper surface of the friction pad; and a vortex-induced vibration column fixedly coupled to the harvesting member at a lower surface of the vortex-induced vibration column. The vortex-induced vibration column is configured to generate vibration by an external force at an upper portion of the vortex-induced vibration column, wherein the first electrode disposed on the electrode pad and the second electrode disposed on the friction pad are electrically connected.

Abstract: An energy harvester includes an electrode part including a plurality of partition walls spaced apart from one another in a horizontal direction, and spaces defined between the plurality of partition walls, and a cantilever part including a cantilever member having at least a partial region provided in the space defined in the electrode part, the cantilever member includes a plurality of cantilever members, each of the plurality of cantilever members having a first end and a second end, wherein the first end is positioned in the space defined in the electrode part, and wherein the second end is fixedly coupled to a housing, and in which a natural frequency of at least one of the plurality of cantilever members is different from a natural frequency of each of the remaining cantilever members.

Abstract: An embodiment catalytic combustion type hydrogen sensor includes a protective thin film disposed on an upper surface of a silicon substrate, the protective thin film including an oxide film and a nitride film sequentially laminated, a heater coupled to an upper surface of the nitride film, an anti-icing film disposed on an upper surface of the protective thin film and covering the heater, the anti-icing film including micro-protrusions disposed on an outer surface thereof, and a catalyst layer deposited on an upper surface of the anti-icing film and coated along surfaces of the micro-protrusions of the anti-icing film, wherein the catalyst layer is configured to be heated by the heater to perform a hydrogen reaction for oxidizing hydrogen and to coat the surfaces of the micro-protrusions to prevent water generated through the hydrogen reaction from freezing.

Abstract: A hydrogen sensor includes a substrate, an insulating part formed on the substrate and provided with a plurality of holes, a first catalyst part formed on an upper end of the insulating part to accelerate the reaction between hydrogen and oxygen, a second catalyst part formed on a surface of the holes to accelerate the reaction between hydrogen and oxygen, and a heater part disposed inside the insulating part to heat the first catalyst part and the second catalyst part, and having an temperature increased by reaction heat generated by the reaction between hydrogen and oxygen.

Abstract: A distance detecting apparatus and a method thereof includes a dual wavelength tuning light source configured to transmit a transmission optical signal by performing band tunability and fine tunability on an optical signal based on non-mechanical scanning; a transmitter optical system configured to transmit the transmission optical signal received from the dual wavelength tuning light source to an outside: a receiver optical system configured to extract a wavelength difference between a reception optical signal received from the outside and the transmission optical signal received from the dual wavelength tuning light source; and a signal processor configured to receive the wavelength difference from the receiver optical system and convert the wavelength difference into distance information.

Abstract: The present disclosure relates to a microelectromechanical systems (MEMS) device and method for manufacturing the same for improving the uniformity of temperature distribution in a heater unit, and the present disclosure discloses a MEMS device and method for manufacturing the same, including a heater unit that is formed on a substrate, and a dummy pattern unit that is formed in a remaining portion except for a portion where the heater unit is formed so as not to be electrically connected to the heater unit.