Abstract: An illumination system includes a measurement stage, a light-providing part, a light-receiving part, and a processing part. The light-providing part includes light sources arranged in a dome shape, which irradiate incident lights to a measurement target on the measurement stage. The light-receiving part acquires reflection lights. The processing part controls the light sources to be turned on/off according to a dome-shaped sine wave pattern. The processing part controls the light sources to be sequentially turned on/off by shifting N times according to the dome-shaped sine wave pattern for a specific measurement position of the measurement target, and calculates a phase at the specific measurement position, an average of intensities of N reflection lights, and a visibility of N reflection lights, from intensities of N reflection lights. Thus, material of the measurement target may be easily determined.

Abstract: A humid air forming device, which cools an object to be measured to a predetermined temperature, and which sprays humid air having a predetermined temperature to the cooled object to be measured, thereby forming moisture particles on the surface of the object to be measured, and a measurement system including the same. The humid air forming device includes a cooling unit that cools the object to be measured to a first temperature or lower; and a humid air supply unit that forms humid air having a second temperature, which is higher than the first temperature, and spraying the humid air toward the surface of the cooled object to be measured, thereby forming moisture particles on the surface of the cooled object to be measured.

Abstract: Disclosed is a three-dimensional shape measuring apparatus using a diffraction grating, comprising: a light splitter installed in a traveling direction of a light generated from a light source unit and configured to reflect a portion of the light along a first path and transmit a portion of the light along a second path; an image sensor unit configured to receive a light traveling along the first path and reflected from a measurement target having at least one hole, and measure the shape of the measurement target; and a diffraction grating disposed on at least one light path among a light path between the light source unit and the light splitter, a light path between the measurement target and the light splitter, and a light path between the measurement target and the image sensor unit.

Abstract: An illumination system includes a measurement stage on which a measurement target is located, a light-providing part having illumination sections providing multi-directional incident lights to the measurement target, a light-receiving part receiving single-directional reflection lights reflected by the measurement target according to the multi-directional incident lights, and a processing part that performs acquiring a first distribution of intensities the single-directional reflection lights with respect to the multi-directional incident lights, acquiring, from the first distribution, a second distribution of intensities of multi-directional reflections lights with respect to a single-directional incident light, and determining material of the measurement target based on parameters of the second distribution. A method of recognizing material using the illumination system and a computer readable non-transitory recording medium recording a program embodying the method are provided.

Abstract: An illumination system includes a measurement stage on which a measurement target is located, a light-providing part having illumination sections providing multi-directional incident lights to the measurement target, a light-receiving part receiving single-directional reflection lights reflected by the measurement target according to the multi-directional incident lights, and a processing part that performs acquiring a first distribution of intensities the single-directional reflection lights with respect to the multi-directional incident lights, acquiring, from the first distribution, a second distribution of intensities of multi-directional reflections lights with respect to a single-directional incident light, and determining material of the measurement target based on parameters of the second distribution. A method of recognizing material using the illumination system and a computer readable non-transitory recording medium recording a program embodying the method are provided.

Abstract: An illumination system for recognizing material includes a measurement stage, a light-providing part, a light-receiving part, and a processing part. The measurement stage is upwardly open and the measurement target is located on the measurement stage. The light-providing part includes a plurality of illumination sections providing incident lights to the measurement target, and provides multi-directional incident lights to the measurement target from multiple upper directions at which the measurement stage is open. The light-receiving part receives single-directional reflection lights reflected by the measurement target according to the multi-directional incident lights provided by the light-providing part.

Abstract: A humid air forming device, which cools an object to be measured to a predetermined temperature, and which sprays humid air having a predetermined temperature to the cooled object to be measured, thereby forming moisture particles on the surface of the object to be measured, and a measurement system including the same. The humid air forming device includes a cooling unit that cools the object to be measured to a first temperature or lower; and a humid air supply unit that forms humid air having a second temperature, which is higher than the first temperature, and spraying the humid air toward the surface of the cooled object to be measured, thereby forming moisture particles on the surface of the cooled object to be measured.

Abstract: Disclosed is a three-dimensional shape measuring apparatus using a diffraction grating, comprising: a light splitter installed in a traveling direction of a light generated from a light source unit and configured to reflect a portion of the light along a first path and transmit a portion of the light along a second path; an image sensor unit configured to receive a light traveling along the first path and reflected from a measurement target having at least one hole, and measure the shape of the measurement target; and a diffraction grating disposed on at least one light path among a light path between the light source unit and the light splitter, a light path between the measurement target and the light splitter, and a light path between the measurement target and the image sensor unit.

Abstract: An illumination system for recognizing material includes a measurement stage, a light-providing part, a light-receiving part, and a processing part. The measurement stage is upwardly open and the measurement target is located on the measurement stage. The light-providing part includes a plurality of illumination sections providing incident lights to the measurement target, and provides multi-directional incident lights to the measurement target from multiple upper directions at which the measurement stage is open. The light-receiving part receives single-directional reflection lights reflected by the measurement target according to the multi-directional incident lights provided by the light-providing part.

Abstract: A shape measuring device includes a light source unit, a light splitting unit, a reference mirror, a light receiving unit and a processing unit. The light source unit generates light and can change the wavelength of the light. The light splitting unit splits the light generated from the light source unit into at least a reference light and a measurement light. The light receiving unit receives the reference light which is reflected by the reference mirror so as to form a reference light path, and the measurement light which is reflected by a light-transmitting target object formed on a substrate so as to form a measurement light path. The processing unit calculates the shape of the measurement argent object based on an interference change resulting from a wavelength change of the light between the reference light and the measurement light received by the light receiving unit.

Abstract: A shape measuring device includes a light source unit, a light splitting unit, a reference mirror, a light receiving unit and a processing unit. The light source unit generates light and can change the wavelength of the light. The light splitting unit splits the light generated from the light source unit into at least a reference light and a measurement light. The light receiving unit receives the reference light which is reflected by the reference mirror so as to form a reference light path, and the measurement light which is reflected by a light-transmitting target object formed on a substrate so as to form a measurement light path. The processing unit calculates the shape of the measurement argent object based on an interference change resulting from a wavelength change of the light between the reference light and the measurement light received by the light receiving unit.

Abstract: The present invention relates to an interferometer and an optical device using same. Unclear interference patterns and restrictions between light source and the interferometer for conventional devices require precise control devices. The present invention enables to control a wave plate of an interferometer to make the amplitude of object beam split by a polarization beam splitter asymmetric against that of reference beam, resulting the brightness of interference patterns adjustable, while using tunable laser as light source of an optical device and adopting frequency scanning methods to prevent restrictions between light source and interferometer.

Abstract: A wavelength-changeable laser apparatus including a laser light source, a collimating lens, a diffraction grating, and a mirror is shown. The laser light source provides a laser light. The collimating lens collects the laser light provided from the laser light source and providing a light that is substantially parallel. The diffraction grating diffracts the light provided from the collimating lens. The mirror reflects the light provided from the diffraction grating back to the diffraction grating, a rotation axis rotatable within a predetermined range of a tuning angle being set therein so that a wavelength of the laser light is changed in a mode hopping form, the minor rotating based on the rotation axis serving as a pivot point. Therefore, a wavelength change speed may be increased and a stability of wavelength change may be improved.