Abstract: Proposed are non-invasive diagnostic method and apparatus for plasma processes in which plasma processes can be monitored in real time by measuring a surface wave resonance frequency generated in plasma or a sheath on the basis of a surface wave resonance principle. The diagnostic method may include a step (S10) of installing at least one probe on one side of an electrostatic chuck (ESC) or on an inner wall of a chamber, a step (S20) of emitting a high frequency onto the plasma or the sheath by the probe, and a step (S30) of detecting a frequency reflected from the plasma or the sheath by the probe. In addition, the diagnostic method may include the step (S40) of extracting a reflection spectrum, a step (S50) of extracting the surface wave resonance frequency, and a step (S60) of extracting electron density or uniformity of the plasma.

Abstract: Disclosed is a continuous process for manufacturing aliphatic polycarbonate by polymerizing carbon dioxide and one or more epoxide compound in the presence of catalyst, in which carbon dioxide, one or more epoxide compound, and the catalyst are continuously supplied to polymerization reactor to produce aliphatic polycarbonate, separate unreacted carbon dioxide and epoxide compound and recycle them as raw materials.

Abstract: Disclosed is a continuous process for manufacturing aliphatic polycarbonate by polymerizing carbon dioxide and one or more epoxide compound in the presence of catalyst, in which carbon dioxide, one or more epoxide compound, and the catalyst are continuously supplied to polymerization reactor to produce aliphatic polycarbonate, separate unreacted carbon dioxide and epoxide compound and recycle them as raw materials.