Patents by Inventor Jangwon Cho

Jangwon Cho has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer processing apparatus
    Patent number: 11996270
    Abstract: A wafer processing apparatus includes a chamber body including a cavity region and a process region; a microwave waveguide configured to introduce a microwave into the cavity region; a first microwave window between the cavity region and the process region; and a magnetic field supplying device configured to apply a magnetic field inside the chamber body, wherein a thickness of the first microwave window is constant, and the first microwave window is configured to control a beam cross-section of the microwave in the process region.
    Type: Grant
    Filed: August 13, 2021
    Date of Patent: May 28, 2024
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Eunhee Jeang, Seongkeun Cho, Kyungrim Kim, Incheol Song, Jangwon Cho
  • WAFER PROCESSING APPARATUS
    Publication number: 20220216039
    Abstract: A wafer processing apparatus includes a chamber body including a cavity region and a process region; a microwave waveguide configured to introduce a microwave into the cavity region; a first microwave window between the cavity region and the process region; and a magnetic field supplying device configured to apply a magnetic field inside the chamber body, wherein a thickness of the first microwave window is constant, and the first microwave window is configured to control a beam cross-section of the microwave in the process region.
    Type: Application
    Filed: August 13, 2021
    Publication date: July 7, 2022
    Inventors: Eunhee Jeang, Seongkeun Cho, Kyungrim Kim, Incheol Song, Jangwon Cho
  • Display screen or portion thereof with graphical user interface
    Patent number: D1026015
    Type: Grant
    Filed: March 4, 2022
    Date of Patent: May 7, 2024
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Sumin Kim, Jangwon Seo, Younga Kim, Eunnim Cho, Heuijin Kwon