Patents by Inventor Janisht Golcha

Janisht Golcha has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240371613
    Abstract: Semiconductor manufacturing processing chambers having an RF isolator between the support ring and the showerhead and/or an RF gasket between the showerhead and the gas funnel are described. A cap insert with a cap housing around the cap insert is on the gas funnel and an RF feed is in contact with the showerhead. A substrate support can be included and may have an RF return path directed through the substrate support.
    Type: Application
    Filed: May 3, 2024
    Publication date: November 7, 2024
    Applicant: Applied Materials, Inc.
    Inventors: Muhannad Mustafa, Janisht Golcha, Sanjeev Baluja, Srinivas Gandikota, Yixiong Yang
  • Publication number: 20230008986
    Abstract: Gas injector with a vacuum channel having an inlet opening in the front face and an outlet opening in the back face of the injector are described. The vacuum channel comprises a first leg extending a first length from the inlet opening in the front face at a first angle relative to the front face and a second leg extending a second length from the first leg to the outlet opening in the back face at a second angle relative to the front face. Processing chambers and methods of use comprising a plurality of processing regions bounded around an outer peripheral edge by one or more vacuum channel. A first processing region has a first vacuum channel with a first outer diameter and a second processing region has a second vacuum channel with a second outer diameter, the first outer diameter being less than the second outer diameter.
    Type: Application
    Filed: July 11, 2022
    Publication date: January 12, 2023
    Applicant: Applied Materials, Inc.
    Inventors: Prahallad Iyengar, Sanjeev Baluja, Kartik Shah, Chaowei Wang, Janisht Golcha, Eric J. Hoffmann, Joseph AuBuchon, Ashutosh Agarwal, Lin Sun, Cong Trinh
  • Patent number: D1071103
    Type: Grant
    Filed: April 11, 2022
    Date of Patent: April 15, 2025
    Assignee: Applied Materials, Inc.
    Inventors: Prahallad Iyengar, Janisht Golcha, Kartik Shah, Chaowei Wang, Sanjeev Baluja
  • Patent number: D1085029
    Type: Grant
    Filed: July 19, 2022
    Date of Patent: July 22, 2025
    Assignee: Applied Materials, Inc.
    Inventors: Prahallad Iyengar, Chaowei Wang, Kartik Shah, Janisht Golcha, Sanjeev Baluja