Patents by Inventor Janne Maria Brok

Janne Maria Brok has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for measuring a structure on a substrate, models for error correction, computer program products for implementing such methods and apparatus
    Patent number: 9772562
    Abstract: A reconstruction process includes measuring structures formed on a substrate by a lithographic process, determining a reconstruction model for generating modeled patterns, computing and minimizing a multi-variable cost function including model errors. Errors induced by nuisance parameters are modeled based on statistical description of the nuisance parameters' behavior, described by probability density functions. From the statistical description model errors are calculated expressed in terms of average model errors and weighing matrices. These are used to modify the cost function so as to reduce the influence of the nuisance parameters in the reconstruction, without increasing the complexity of the reconstruction model. The nuisance parameters may be parameters of the modeled structure, and/or parameters of an inspection apparatus used in the reconstruction.
    Type: Grant
    Filed: November 5, 2014
    Date of Patent: September 26, 2017
    Assignee: ASML Netherlands B.V.
    Inventors: Martijn Peter Mink, Janne Maria Brok, Irwan Dani Setija
  • Method and Apparatus for Measuring a Structure on a Substrate, Models for Error Correction, Computer Program Products for Implementing such Methods and Apparatus
    Publication number: 20160313653
    Abstract: A reconstruction process includes measuring structures formed on a substrate by a lithographic process, determining a reconstruction model for generating modeled patterns, computing and minimizing a multi-variable cost function including model errors. Errors induced by nuisance parameters are modeled based on statistical description of the nuisance parameters' behavior, described by probability density functions. From the statistical description model errors are calculated expressed in terms of average model errors and weighing matrices. These are used to modify the cost function so as to reduce the influence of the nuisance parameters in the reconstruction, without increasing the complexity of the reconstruction model. The nuisance parameters may be parameters of the modeled structure, and/or parameters of an inspection apparatus used in the reconstruction.
    Type: Application
    Filed: November 5, 2014
    Publication date: October 27, 2016
    Applicant: ASML Netherlands B.V.
    Inventors: Martijn Peter Mink, Janne Maria Brok, Irwan Dani Setija