Abstract: A method for laser processing of workpieces in liquid, the method including the following steps: providing a workpiece in a process chamber filled with a liquid; focusing pulsed laser radiation on a surface of the workpiece using a focusing unit; producing a relative movement between the focused laser radiation and the workpiece surface using a positioning unit; detecting a gas bubble in a predefined detection region using a detection unit; and conducting a first action to avoid or reduce interaction effects between the laser radiation and the detected gas bubble.

Abstract: A system for material-ablative laser processing of workpieces in liquid is provided with a laser beam source for generating pulsed laser radiation; a focusing unit for focusing the laser radiation onto a workpiece; and a process chamber for receiving a workpiece. The process chamber includes a first side having a transparent process window for letting pass laser radiation; a second side arranged opposite the first side; a chamber wall surrounding an interior of the process chamber; and a flow generator for generating a flow within the interior of the process chamber. The flow generator includes a first flow generator unit for generating a first flow along a first flow axis and a second flow generator unit for generating a second flow along a second flow axis; and a positioning unit for adjusting the position of the laser radiation on the workpiece.

Abstract: A method for laser processing of workpieces in liquid, the method including the following steps: providing a workpiece in a process chamber filled with a liquid; focusing pulsed laser radiation on a surface of the workpiece using a focusing unit; producing a relative movement between the focused laser radiation and the workpiece surface using a positioning unit; detecting a gas bubble in a predefined detection region using a detection unit; and conducting a first action to avoid or reduce interaction effects between the laser radiation and the detected gas bubble.