Patents by Inventor Janosch Müller, legal representative

Janosch Müller, legal representative has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7130129
    Abstract: A reticle-masking (REMA) objective for imaging an object plane onto an image plane has a condenser portion, an intermediate portion, and a field lens portion. The three portions together have no more than 10 lenses with a combined total of no more than five aspheric lens surfaces. Each of the three portions of the REMA objective has one or two aspheric lens surfaces.
    Type: Grant
    Filed: December 12, 2003
    Date of Patent: October 31, 2006
    Assignee: Carl Zeiss SMT AG
    Inventors: Jorg Schultz, Johannes Wangler, Karl-Heinz Schuster, Alexander Sohmer, Alexander Epple, Christa Müller, legal representative, Janosch Müller, legal representative, Jurgen Grunwald, deceased