Patents by Inventor Jao Kuo Cheng

Jao Kuo Cheng has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Real time mass flow control system with interlock
    Patent number: 6704667
    Abstract: An interlock controller provides real time monitoring of the flow of gases or fluids into a semiconductor processing chamber and interrupts the flow when the peak flow exceeds a predetermined level. The controller receives signals from a mass flow control valve, respectively representing a commanded flow rate and an actual flow rate. The difference between these two signals is calculated and if the difference exceeds a certain value, a measurement cycle is initiated during which the peak flow rate is measured. If the measured peak low rate is greater than a predetermined value, then the controller closes a shut off vale to interrupt the flow into the chamber.
    Type: Grant
    Filed: May 13, 2002
    Date of Patent: March 9, 2004
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd
    Inventors: Lee Chien Wei, Jao Kuo Cheng, Lee Hsi Lung
  • Real time mass flow control system with interlock
    Publication number: 20030212507
    Abstract: An interlock controller provides real time monitoring of the flow of gases or fluids into a semiconductor processing chamber and interrupts the flow when the peak flow exceeds a predetermined level. The controller receives signals from a mass flow control valve, respectively representing a commanded flow rate and an actual flow rate. The difference between these two signals is calculated and if the difference exceeds a certain value, a measurement cycle is initiated during which the peak flow rate is measured. If the measured peak low rate is greater than a predetermined value, then the controller closes a shut off vale to interrupt the flow into the chamber.
    Type: Application
    Filed: May 13, 2002
    Publication date: November 13, 2003
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Lee Chien Wei, Jao Kuo Cheng, Lee Hsi Lung