Patents by Inventor Jari Ruotsalainen

Jari Ruotsalainen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Droplet generator for lithographic apparatus, EUV source and lithographic apparatus
    Patent number: 10481498
    Abstract: Droplet generators, such as used in an EUV radiation source, and associated EUV radiation sources and lithographic apparatuses. A droplet generator can include a nozzle assembly to emit the fuel as droplets, the nozzle assembly being within a pressurized environment at substantially the same pressure as the fuel pressure within the droplet generator. A droplet generator can include an actuator in contact with and biased against a pump chamber by means of a biasing mechanism having an actuator support biased against the actuator. The actuator acts on the fuel within the pump chamber to create droplets. The actuator support has a material with a greater coefficient of thermal expansion than its surrounding structure, such that it is moveable within the surrounding structure at ambient temperature, but expands against the surrounding structure at an operating temperature, so as to clamp the actuator support against the surrounding structure at the operating temperature.
    Type: Grant
    Filed: December 15, 2016
    Date of Patent: November 19, 2019
    Assignee: ASML Netherlands B.V.
    Inventors: Johan Frederik Dijksman, Bastiaan Lambertus Wilhelmus Marinus van de Ven, Koen Gerhardus Winkels, Theodorus Wilhelmus Driessen, Georgiy O. Vaschenko, Peter Michael Baumgart, Wilhelmus Henricus Theodorus Maria Aangenent, Jan Okke Nieuwenkamp, Wim Ronald Kampinga, Jari Ruotsalainen
  • DROPLET GENERATOR FOR LITHOGRAPHIC APPARATUS, EUV SOURCE AND LITHOGRAPHIC APPARATUS
    Publication number: 20180364580
    Abstract: Droplet generators, such as used in an EUV radiation source, and associated EUV radiation sources and lithographic apparatuses. A droplet generator can include a nozzle assembly to emit the fuel as droplets, the nozzle assembly being within a pressurized environment at substantially the same pressure as the fuel pressure within the droplet generator. A droplet generator can include an actuator in contact with and biased against a pump chamber by means of a biasing mechanism having an actuator support biased against the actuator. The actuator acts on the fuel within the pump chamber to create droplets. The actuator support has a material with a greater coefficient of thermal expansion than its surrounding structure, such that it is moveable within the surrounding structure at ambient temperature, but expands against the surrounding structure at an operating temperature, so as to clamp the actuator support against the surrounding structure at the operating temperature.
    Type: Application
    Filed: December 15, 2016
    Publication date: December 20, 2018
    Inventors: Johan Frederik Dijksman, Bastiaan Lambertus Wilhelmus Marinus van de Ven, Koen Gerhardus Winkels, Theodorus Wilhelmus Driessen, Georgiy O. Vaschenko, Peter Michael Baumgart, Wilhelmus Henricus Theodorus Maria Aangenent, Jan Okke Nieuwenkamp, Wim Ronald Kampinga, Jari Ruotsalainen