Patents by Inventor Jari Vanhatalo

Jari Vanhatalo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8226768
    Abstract: The present invention relates to an apparatus for evaporation comprising a vacuum chamber, a substrate stage defining a substrate plane and at least one effusion cell, the effusion cell comprising a crucible having a volume, wherein said effusion cell, crucible and substrate stage are arranged inside the vacuum chamber. The crucible comprises a first end, a second end, at least one side wall and an aperture. In a typical apparatus according to the invention the aperture is situated in the first wall or in a side wall closer to the first end than the second end, the second end arranged closer to the substrate plane than the first end. The invention also relates to a crucible for evaporation, having a volume, comprising a first end, a second end, at least one side wall and an aperture. The invention further relates to a method of growing a film on a substrate.
    Type: Grant
    Filed: May 20, 2009
    Date of Patent: July 24, 2012
    Assignee: DCA Instruments Oy
    Inventor: Jari Vanhatalo
  • Patent number: 7820125
    Abstract: The phosphorus effusion cell arrangement according to the present invention comprises a first vacuum container for red phosphorus, a second vacuum container for white phosphorus, said first and second vacuum containers being interconnected, means for providing vacuum, a thermal cracker in connection with said second vacuum container, as well as a control valve between said second vacuum container and said thermal cracker. The present invention is characterized in that it further comprises a separating valve between said first and second vacuum containers, provided that there is no direct connection between said first vacuum container and said thermal cracker. The invention also relates to a method for producing molecular phosphorus P2.
    Type: Grant
    Filed: June 30, 2004
    Date of Patent: October 26, 2010
    Assignee: DCA Instruments Oy
    Inventors: Lasse Salminen, Esa Supponen, Jari Vanhatalo
  • Publication number: 20090301390
    Abstract: The present invention relates to an apparatus for evaporation comprising a vacuum chamber, a substrate stage defining a substrate plane and at least one effusion cell, the effusion cell comprising a crucible having a volume, wherein said effusion cell, crucible and substrate stage are arranged inside the vacuum chamber. The crucible comprises a first end, a second end, at least one side wall and an aperture. In a typical apparatus according to the invention the aperture is situated in the first wall or in a side wall closer to the first end than the second end, the second end arranged closer to the substrate plane than the first end. The invention also relates to a crucible for evaporation, having a volume, comprising a first end, a second end, at least one side wall and an aperture. The invention further relates to a method of growing a film on a substrate.
    Type: Application
    Filed: May 20, 2009
    Publication date: December 10, 2009
    Applicant: DCA INSTRUMENTS OY
    Inventor: Jari VANHATALO
  • Publication number: 20080019897
    Abstract: The phosphorus effusion cell arrangement according to the present invention comprises a first vacuum container for red phosphorus, a second vacuum container for white phosphorus, said first and second vacuum containers being interconnected, means for providing vacuum, a thermal cracker in connection with said second vacuum container, as well as a control valve between said second vacuum container and said thermal cracker. The present invention is characterized in that it further comprises a separating valve between said first and second vacuum containers, provided that there is no direct connection between said first vacuum container and said thermal cracker. The invention also relates to a method for producing molecular phosphorus P2.
    Type: Application
    Filed: June 30, 2004
    Publication date: January 24, 2008
    Inventors: Lasse Salminen, Esa Supponen, Jari Vanhatalo
  • Patent number: 5714008
    Abstract: Apparati and methods for varying the flux of a molecular beam emanating from an effusion cell are disclosed. The apparatus includes a means for controllably adjusting the angular distribution of a molecular field effusing from a source material within the effusion cell, therein adjusting the flux of the beam. The method herein disclosed, with respect to the related apparati, including the step of selectively altering the angular distribution of an effusing molecular field, produced by a heated source material, which comprises the molecular beam, thereby varying the flux of the beam.
    Type: Grant
    Filed: April 29, 1996
    Date of Patent: February 3, 1998
    Assignee: Northrop Grumman Corporation
    Inventors: Myung B. Lee, Jari Vanhatalo
  • Patent number: 5616180
    Abstract: Apparati and methods for varying the flux of a molecular beam emanating from an effusion cell are disclosed. The apparatus includes a means for controllably adjusting the angular distribution of a molecular field effusing from a source material within the effusion cell, therein adjusting the flux of the beam. The method herein disclosed, with respect to the related apparati, including the step of selectively altering the angular distribution of an effusing molecular field, produced by a heated source material, which comprises the molecular beam, thereby varying the flux of the beam.
    Type: Grant
    Filed: December 22, 1994
    Date of Patent: April 1, 1997
    Assignee: Northrop Grumman Corporation
    Inventors: Myung B. Lee, Jari Vanhatalo