Patents by Inventor Jasent Montano

Jasent Montano has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • CMP apparatus and method
    Patent number: 7229339
    Abstract: Methods and apparatus are provided for the chemical mechanical planarization (CMP) of a surface of a work piece. In accordance with one embodiment of the invention the apparatus comprises a plurality of CMP systems, a plurality of load cups for loading unprocessed work pieces into and unloading processed work pieces from the plurality of CMP systems, a plurality of cleaning stations for cleaning processed work pieces unloaded from the CMP systems, and a single robot configured to transfer unprocessed work pieces to the plurality of load cups and to transfer processed work pieces from the load cups to the plurality of cleaning stations.
    Type: Grant
    Filed: July 2, 2004
    Date of Patent: June 12, 2007
    Assignee: Novellus Systems, Inc.
    Inventors: John F. Stumpf, Franklin D. Root, Brian Severson, David Marquardt, John Derwood Herb, James Jed Crawford, Rand Conner, Jasent Montano, Kevin Bertsch, Robert Marshall Stowell, Edmund Minshall, Timothy Cleary
  • CMP apparatus and method
    Publication number: 20060003671
    Abstract: Methods and apparatus are provided for the chemical mechanical planarization (CMP) of a surface of a work piece. In accordance with one embodiment of the invention the apparatus comprises a plurality of CMP systems, a plurality of load cups for loading unprocessed work pieces into and unloading processed work pieces from the plurality of CMP systems, a plurality of cleaning stations for cleaning processed work pieces unloaded from the CMP systems, and a single robot configured to transfer unprocessed work pieces to the plurality of load cups and to transfer processed work pieces from the load cups to the plurality of cleaning stations.
    Type: Application
    Filed: July 2, 2004
    Publication date: January 5, 2006
    Inventors: John Stumpf, Franklin Root, Brian Severson, David Marquardt, John Herb, James Crawford, Rand Conner, Jasent Montano, Kevin Bertsch, Robert Stowell, Edmund Minshall, Timothy Cleary