Patents by Inventor Jason A. Babcoke

Jason A. Babcoke has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Gas introduction system for a reactor
    Publication number: 20020073924
    Abstract: A process chamber has one or more gas inlets. One gas inlet is formed as a ring surrounding the periphery of a substrate retained in the process chamber. Added control over a deposition process is obtained by such a ring. In one embodiment, the ring is moveable. Various arrangements of gas inlets and valves are described.
    Type: Application
    Filed: October 24, 2001
    Publication date: June 20, 2002
    Inventors: Tony P. Chiang, Karl F. Leeser, Jeffrey A. Brown, Jason A. Babcoke