Abstract: The embodiments described herein provide scanners with a modular construction that includes a separately formed scan plate coupled to a microelectromechanical system (MEMS) flexure structure. Such modular scanners, when incorporated into laser scanning devices, reflect laser light into a pattern of scan lines. In general, the modular scanner includes a scan plate that is formed separately from the flexure structure. The scan plate and flexure structure each include coupling features that serve to couple the scan plate to the flexure structure. The flexure structure includes flexure arms that facilitate rotation of the scan plate to reflect laser light into a pattern of scan lines.

Abstract: The embodiments described herein provide scanners with a modular construction that includes a separately formed scan plate coupled to a microelectromechanical system (MEMS) flexure structure. Such modular scanners, when incorporated into laser scanning devices, reflect laser light into a pattern of scan lines. In general, the modular scanner includes a scan plate that is formed separately from the flexure structure. The scan plate and flexure structure each include coupling features that serve to couple the scan plate to the flexure structure. The flexure structure includes flexure arms that facilitate rotation of the scan plate to reflect laser light into a pattern of scan lines.

Abstract: The embodiments described herein provide microelectromechanical system (MEMS) scanners with increased resistance to distortion in the mirror surface. Such MEMS scanners, when incorporated into laser scanning devices, are used to reflect laser light into a pattern of scan lines. Thus, by reducing distortion in the scanning surface these MEMS scanners can provide improved performance in scanning laser devices, including scanning laser projectors and laser depth scanners. In general, this is accomplished by providing a MEMS scanner where the connection to the scan plate is made at an intermediate support structure, and at a point on that intermediate support structure that is offset from the scanning surface. Providing the connection to the scan plate at points offset from the scanning surface can reduce the distortion that occurs in the scanning surface as a result of rotational forces in the MEMS scanner.

Abstract: Scanning platforms for use in scanning laser devices are described herein. These scanning platforms are particularly applicable to scanning laser devices that use microelectromechanical system (MEMS) structures to facilitate mirror motion. The scanning platforms include a centrally located stationary mount portion and a movable portion that surrounds the stationary portion. The movable portion is configured to be coupled to a mirror and to facilitate motion of that mirror. Such a scanning platform can facilitate reduced size in scanning mirror assembly, and thus can facilitate a more compact scanning laser device.

Abstract: A microelectromechanical systems (MEMS) device includes a scanning platform suspended from a fixed platform by two flexures that form a pivot axis. The two flexures may be symmetric or asymmetric about a centerline of the scanning platform. At least one flexure includes two segments that are not parallel to each other. A second flexure may include two segments with one segment being wider than the other. Flexure design reduces effects of mounting and thermal stresses when the MEMS device is mounted as part of an assembly.

Abstract: A microelectromechanical systems (MEMS) device includes a scanning platform suspended from a fixed platform by two flexures that form a pivot axis. The two flexures may be symmetric or asymmetric about a centerline of the scanning platform. At least one flexure includes two segments that are not parallel to each other. A second flexure may include two segments with one segment being wider than the other. Flexure design reduces effects of mounting and thermal stresses when the MEMS device is mounted as part of an assembly.

Abstract: A microelectromechanical systems (MEMS) device includes a scanning platform suspended from a fixed platform by two flexures that form a pivot axis. The two flexures may be symmetric or asymmetric about a centerline of the scanning platform. At least one flexure includes two segments that are not parallel to each other. A second flexure may include two segments with one segment being wider than the other. Flexure design reduces effects of mounting and thermal stresses when the MEMS device is mounted as part of an assembly.

Abstract: Briefly, in accordance with one or more embodiments, a piezoresistive stress sensor comprises a plurality of piezoresistive elements coupled in a bridge circuit disposed on, near, or contiguous to a flexure to detect torsional flexing about an axis of the flexure. The bridge circuit has at least two nodes disposed along the axis of the flexure and at least two nodes disposed off the axis of the flexure to maximize, or nearly maximize, an output of the bridge circuit in response to the torsional flexing of the flexure. A torsional flexing component of the output signal of the bridge circuit is relatively increased with respect to a component of the output signal generated by non-torsional stress of the flexure, or a component of the output signal generated by non-torsional stress of the flexure is reduced with respect to the torsional flexing component of the output signal, or combinations thereof.

Abstract: Briefly, in accordance with one or more embodiments, a rotating scanning platform comprises a rotating body and two or more suspension flexures to support the rotating body at a first end of respective suspension flexures, wherein the suspension flexures have a length that is greater than a radius of the rotating body, and the suspension flexures are disposed at an offset from a center of rotation of the rotating body. The suspension flexures are fixed, respectively, to a substrate at a second end at a location that is closer to the center of rotation than to the first end of a respective suspension flexure to allow the rotating body to rotate about the center of rotation with generally linear rotation in response to a drive signal.

Abstract: A microelectromechanical system (MEMS) includes a conductor with improved reliability. The conductor flexes with a moving member in the MEMS device, and the improved reliability is achieved through material selections that provides increased fatigue resistance, reduced crack propagation, and/or mechanisms for improved live at a given strain level. The conductor may include a single material, or may include layers of different materials.

Abstract: Briefly, in accordance with one or more embodiments, a scanner for a scanned beam display may comprise a scanning platform having a mirror disposed thereon to reflect a beam of light impinging on the mirror, a drive coil disposed on the scanning platform to scan the reflected beam of light in response to a drive current applied to the drive coil. The drive coil has coil winding segments having a narrower width in one or more regions of the drive coil, and has coil winding segments having a greater width in one or more other regions of the drive coil to provide a the drive coil with a reduced electrical resistance.

Abstract: Briefly, in accordance with one or more embodiments, a piezoresistive stress sensor comprises a plurality of piezoresistive elements coupled in a bridge circuit disposed on, near, or contiguous to a flexure to detect torsional flexing about an axis of the flexure. The bridge circuit has at least two nodes disposed along the axis of the flexure and at least two nodes disposed off the axis of the flexure to maximize, or nearly maximize, an output of the bridge circuit in response to the torsional flexing of the flexure. A torsional flexing component of the output signal of the bridge circuit is relatively increased with respect to a component of the output signal generated by non-torsional stress of the flexure, or a component of the output signal generated by non-torsional stress of the flexure is reduced with respect to the torsional flexing component of the output signal, or combinations thereof.

Abstract: Briefly, in accordance with one or more embodiments, a scanner for a scanned beam display may comprise a scanning platform having a mirror disposed thereon to reflect a beam of light impinging on the mirror, a drive coil disposed on the scanning platform to scan the reflected beam of light in response to a drive current applied to the drive coil. The drive coil has coil winding segments having a narrower width in one or more regions of the drive coil, and has coil winding segments having a greater width in one or more other regions of the drive coil to provide a the drive coil with a reduced electrical resistance.

Abstract: A microelectromechanical system (MEMS) includes a conductor with improved reliability. The conductor flexes with a moving member in the MEMS device, and the improved reliability is achieved through material selections that provides increased fatigue resistance, reduced crack propagation, and/or mechanisms for improved live at a given strain level. The conductor may include a single material, or may include layers of different materials.

Abstract: Briefly, in accordance with one or more embodiments, a MEMS device may comprise a coil frame having a drive coil disposed thereon and being supported by one or more suspension arms disposed along an axis of the coil frame, and a mirror platform having a mirror disposed thereon. The mirror platform may be coupled to the coil frame at connection points generally disposed along the axis in order to reduce deflection of the mirror platform to reduce stress on the mirror in order to maintain the relative flatness of the mirror surface. Furthermore, the mirror platform may include flexible members disposed near an edge of the mirror platform generally along the axis to isolate the mirror platform and the mirror from warping of the coil frame and twist of the suspension arms to further maintain the relative flatness of the mirror.

Abstract: Briefly, in accordance with one or more embodiments, a coil for a MEMS device, and/or a structure on which the coil is disposed, may have one or more linear segments and one or more non-linear segments. One or more of the non-linear segments may be curved to increase a responsiveness of the coil to the magnetic field in which the coil is operating to provide an increased torque on the rotation of the mirror of the MEMS device in response to a drive signal applied to the coil in the presence of the magnetic field. The non-linear coil may have other shapes and may be any arbitrary shape.

Abstract: A MEMS oscillator, such as a MEMS scanner, has an improved and simplified drive scheme and structure. Drive impulses may be transmitted to an oscillating mass via torque through the support arms. For multi-axis oscillators drive signals for two or more axes may be superimposed by a driver circuit and transmitted to the MEMS oscillator. The oscillator responds in each axis according to its resonance frequency in that axis. The oscillator may be driven resonantly in some or all axes. Improved load distribution results in reduced deformation. A simplified structure offers multi-axis oscillation using a single moving body. Another structure directly drives a plurality of moving bodies. Another structure eliminates actuators from one or more moving bodies, those bodies being driven by their support arms.

Abstract: A MEMS oscillator, such as a MEMS scanner, has an improved and simplified drive scheme and structure. Drive impulses may be transmitted to an oscillating mass via torque through the support arms. For multi-axis oscillators drive signals for two or more axes may be superimposed by a driver circuit and transmitted to the MEMS oscillator. The oscillator responds in each axis according to its resonance frequency in that axis. The oscillator may be driven resonantly in some or all axes. Improved load distribution results in reduced deformation. A simplified structure offers multi-axis oscillation using a single moving body. Another structure directly drives a plurality of moving bodies. Another structure eliminates actuators from one or more moving bodies, those bodies being driven by their support arms.

Abstract: A MEMS oscillator, such as a MEMS scanner, has an improved and simplified drive scheme and structure. Drive impulses may be transmitted to an oscillating mass via torque through the support arms. For multi-axis oscillators drive signals for two or more axes may be superimposed by a driver circuit and transmitted to the MEMS oscillator. The oscillator responds in each axis according to its resonance frequency in that axis. The oscillator may be driven resonantly in some or all axes. Improved load distribution results in reduced deformation. A simplified structure offers multi-axis oscillation using a single moving body. Another structure directly drives a plurality of moving bodies. Another structure eliminates actuators from one or more moving bodies, those bodies being driven by their support arms.

Abstract: Briefly, in accordance with one or more embodiments, a MEMS device may comprise a coil frame having a drive coil disposed thereon and being supported by one or more suspension arms disposed along an axis of the coil frame, and a mirror platform having a mirror disposed thereon. The mirror platform may be coupled to the coil frame at connection points generally disposed along the axis in order to reduce deflection of the mirror platform to reduce stress on the mirror in order to maintain the relative flatness of the mirror surface. Furthermore, the mirror platform may include flexible members disposed near an edge of the mirror platform generally along the axis to isolate the mirror platform and the mirror from warping of the coil frame and twist of the suspension arms to further maintain the relative flatness of the mirror.