Patents by Inventor Jason B. Taylor

Jason B. Taylor has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SILICON-RICH LOW-HYDROGEN CONTENT SILICON NITRIDE FILM
    Publication number: 20080286984
    Abstract: In one embodiment, a method for forming a silicon nitride film is provided. The method includes providing a plasma-enhanced chemical vapor deposition (PECVD) reactor with a semiconductor substrate therein; flowing a gas mixture consisting of silane and nitrogen into the PECVD reactor; and forming a plasma in the PECVD reactor, whereby the silicon nitride film is deposited on the semiconductor substrate.
    Type: Application
    Filed: May 14, 2007
    Publication date: November 20, 2008
    Inventors: Jason B. Taylor, Chiliang Chen