Patents by Inventor Jason C. H. Lin

Jason C. H. Lin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and methods for optically detecting defects in voltage contrast test structures
    Patent number: 6774648
    Abstract: Disclosed are apparatus and methods for optically inspecting a voltage contrast type test structure, product circuit pattern, or the like. An optical image of a voltage contrast type test structure is generated. When the optical image has a first type of intensity pattern, it is determined that there is a defect within the test structure. When the optical image has a second type of intensity pattern, it is determined that there is no defect. The intensity patterns correspond to different voltage potential patterns that are expected to be generated if the test structure were subject to a voltage contrast inspection.
    Type: Grant
    Filed: August 6, 2002
    Date of Patent: August 10, 2004
    Assignee: KLA-Tencor Technologies Corporation
    Inventors: Jason C. H. Lin, Steven G. Oestreich