Patents by Inventor Jason C. Yee

Jason C. Yee has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6384408
    Abstract: A scanning electron microscope (SEM) is calibrated for the effects of local charging on a measured critical dimension (CD) of a wafer by first calibrating the microscope with respect to a calibration wafer with a known CD. Local charging on a wafer may be measured as a local landing energy (LLE) so that a scale factor based on a ratio of LLEs for the measurement wafer and a calibration wafer is used to correct a measured CD for the measurement wafer.
    Type: Grant
    Filed: August 11, 1999
    Date of Patent: May 7, 2002
    Assignee: Kla-Tencor Corporation
    Inventors: Jason C. Yee, Laurence S. Hordon, Weidong Liu, David M. Goodstein