Patents by Inventor Jason Mathew Layton

Jason Mathew Layton has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of processing wafers with low mass support
    Patent number: 6284048
    Abstract: A method is provided for treating wafers on a low mass support. The method includes mounting a temperature sensor in proximity to the wafer, which is supported on the low mass support, such that the sensor is only loosely thermally coupled to the wafer. A temperature controller is programmed to critically tune the wafer temperature in a temperature ramp, though the controller directly controls the sensor temperature. A wafer treatment, such as epitaxial silicon deposition, is started before the sensor temperature has stabilized. Accordingly, significant time is saved for the treatment process, and wafer throughput improved.
    Type: Grant
    Filed: June 19, 2000
    Date of Patent: September 4, 2001
    Assignee: ASM America, Inc
    Inventors: Franciscus Bernardus Maria Van Bilsen, Jason Mathew Layton, Ivo Raaijmakers
  • Method of processing wafers with low mass support
    Patent number: 6121061
    Abstract: A method is provided for treating wafers on a low mass support. The method includes mounting a temperature sensor in proximity to the wafer, which is supported on the low mass support, such that the sensor is only loosely thermally coupled to the wafer. A temperature controller is programmed to critically tune the wafer temperature in a temperature ramp, though the controller directly controls the sensor temperature. A wafer treatment, such as epitaxial silicon deposition, is started before the sensor temperature has stabilized. Accordingly, significant time is saved for the treatment process, and wafer throughput improved.
    Type: Grant
    Filed: November 2, 1998
    Date of Patent: September 19, 2000
    Assignee: ASM America, Inc.
    Inventors: Franciscus Bernardus Maria Van Bilsen, Jason Mathew Layton, Ivo Raaijmakers