Patents by Inventor Jason Michael LAMB

Jason Michael LAMB has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Alignment systems employing actuators providing relative displacement between lid assemblies of process chambers and substrates, and related methods
    Patent number: 10858735
    Abstract: Alignment systems employing actuators provide relative displacement between lid assemblies of process chambers and substrates, and related methods are disclosed. A process chamber includes chamber walls defining a process volume in which a substrate may be placed and the walls support a lid assembly of the process chamber. The lid assembly contains at least one of an energy source and a process gas dispenser. Moreover, an alignment system may include at least one each of a bracket, an interface member, and an actuator. By attaching the bracket to the chamber wall and securing the interface member to the lid assembly, the actuator may communicate with the bracket and the interface member to provide relative displacement between the chamber wall and the lid assembly. In this manner, the lid assembly may be positioned relative to the substrate to improve process uniformity across the substrate within the process chamber.
    Type: Grant
    Filed: September 5, 2019
    Date of Patent: December 8, 2020
    Assignee: Applied Materials, Inc.
    Inventors: Danny D. Wang, Jason Michael Lamb, Jun Tae Choi, Rupankar Choudhury, Zhong Qiang Hua, Juan Carlos Rocha-Alvarez
  • ALIGNMENT SYSTEMS EMPLOYING ACTUATORS PROVIDING RELATIVE DISPLACEMENT BETWEEN LID ASSEMBLIES OF PROCESS CHAMBERS AND SUBSTRATES, AND RELATED METHODS
    Publication number: 20190390334
    Abstract: Alignment systems employing actuators provide relative displacement between lid assemblies of process chambers and substrates, and related methods are disclosed. A process chamber includes chamber walls defining a process volume in which a substrate may be placed and the walls support a lid assembly of the process chamber. The lid assembly contains at least one of an energy source and a process gas dispenser. Moreover, an alignment system may include at least one each of a bracket, an interface member, and an actuator. By attaching the bracket to the chamber wall and securing the interface member to the lid assembly, the actuator may communicate with the bracket and the interface member to provide relative displacement between the chamber wall and the lid assembly. In this manner, the lid assembly may be positioned relative to the substrate to improve process uniformity across the substrate within the process chamber.
    Type: Application
    Filed: September 5, 2019
    Publication date: December 26, 2019
    Inventors: Danny D. WANG, Jason Michael LAMB, Jun Tae CHOI, Rupankar CHOUDHURY, Zhong Qiang HUA, Juan Carlos ROCHA-ALVAREZ
  • Alignment systems employing actuators providing relative displacement between lid assemblies of process chambers and substrates, and related methods
    Patent number: 10435786
    Abstract: Alignment systems employing actuators provide relative displacement between lid assemblies of process chambers and substrates, and related methods are disclosed. A process chamber includes chamber walls defining a process volume in which a substrate may be placed and the walls support a lid assembly of the process chamber. The lid assembly contains at least one of an energy source and a process gas dispenser. Moreover, an alignment system may include at least one each of a bracket, an interface member, and an actuator. By attaching the bracket to the chamber wall and securing the interface member to the lid assembly, the actuator may communicate with the bracket and the interface member to provide relative displacement between the chamber wall and the lid assembly. In this manner, the lid assembly may be positioned relative to the substrate to improve process uniformity across the substrate within the process chamber.
    Type: Grant
    Filed: October 23, 2014
    Date of Patent: October 8, 2019
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Danny D. Wang, Jun Tae Choi, Rupankar Choudhury, Zhong Qiang Hua, Juan Carlos Rocha-Alvarez, Jason Michael Lamb
  • ALIGNMENT SYSTEMS EMPLOYING ACTUATORS PROVIDING RELATIVE DISPLACEMENT BETWEEN LID ASSEMBLIES OF PROCESS CHAMBERS AND SUBSTRATES, AND RELATED METHODS
    Publication number: 20160068951
    Abstract: Alignment systems employing actuators provide relative displacement between lid assemblies of process chambers and substrates, and related methods are disclosed. A process chamber includes chamber walls defining a process volume in which a substrate may be placed and the walls support a lid assembly of the process chamber. The lid assembly contains at least one of an energy source and a process gas dispenser. Moreover, an alignment system may include at least one each of a bracket, an interface member, and an actuator. By attaching the bracket to the chamber wall and securing the interface member to the lid assembly, the actuator may communicate with the bracket and the interface member to provide relative displacement between the chamber wall and the lid assembly. In this manner, the lid assembly may be positioned relative to the substrate to improve process uniformity across the substrate within the process chamber.
    Type: Application
    Filed: October 23, 2014
    Publication date: March 10, 2016
    Inventors: Danny D. WANG, Jun Tae CHOI, Rupankar CHOUDHURY, Zhong Qiang HUA, Juan Carlos ROCHA-ALVAREZ, Jason Michael LAMB