Patents by Inventor Jason Reece

Jason Reece has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11889695
    Abstract: A device comprises an array of elevationally-extending transistors and a circuit structure adjacent and electrically coupled to the elevationally-extending transistors of the array. The circuit structure comprises a stair step structure comprising vertically-alternating tiers comprising conductive steps that are at least partially elevationally separated from one another by insulative material. Operative conductive vias individually extend elevationally through one of the conductive steps at least to a bottom of the vertically-alternating tiers and individually electrically couple to an electronic component below the vertically-alternating tiers. Dummy structures individually extend elevationally through one of the conductive steps at least to the bottom of the vertically-alternating tiers. Methods are also disclosed.
    Type: Grant
    Filed: October 18, 2021
    Date of Patent: January 30, 2024
    Assignee: Micron Technology, Inc.
    Inventors: Paolo Tessariol, Justin B. Dorhout, Indra V. Chary, Jun Fang, Matthew Park, Zhiqiang Xie, Scott D. Stull, Daniel Osterberg, Jason Reece, Jian Li
  • Publication number: 20230354595
    Abstract: Methods of improving adhesion between a photoresist and conductive or insulating structures. The method comprises forming a slot through at least a portion of alternating conductive structures and insulating structures on a substrate. Portions of the conductive structures or of the insulating structures are removed to form recesses in the conductive structures or in the insulating structures. A photoresist is formed over the alternating conductive structures and insulating structures and within the slot. Methods of improving adhesion between a photoresist and a spin-on dielectric material are also disclosed, as well as methods of forming a staircase structure.
    Type: Application
    Filed: June 12, 2023
    Publication date: November 2, 2023
    Inventors: Rohit Kothari, Jason C. McFarland, Jason Reece, David A. Kewley, Adam L. Olson
  • Patent number: 11678481
    Abstract: Methods of improving adhesion between a photoresist and conductive or insulating structures. The method comprises forming a slot through at least a portion of alternating conductive structures and insulating structures on a substrate. Portions of the conductive structures or of the insulating structures are removed to form recesses in the conductive structures or in the insulating structures. A photoresist is formed over the alternating conductive structures and insulating structures and within the slot. Methods of improving adhesion between a photoresist and a spin-on dielectric material are also disclosed, as well as methods of forming a staircase structure.
    Type: Grant
    Filed: February 11, 2021
    Date of Patent: June 13, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Rohit Kothari, Jason C. McFarland, Jason Reece, David A. Kewley, Adam L. Olson
  • Publication number: 20230063178
    Abstract: A microelectronic device includes a stack structure including a vertically alternating sequence of conductive structures and insulating structures arranged in tiers, a dielectric-filled opening vertically extending into the stack structure and defined between two internal sidewalls of the stack structure, a stadium structure within the stack structure and comprising steps defined by horizontal ends of at least some of the tiers, a first ledge extending upward from a first uppermost step of the steps of the stadium structure and interfacing with a first internal sidewall of the two internal sidewalls of the stack structure, and a second ledge extending upward from a second, opposite uppermost step of the steps of the stadium structure and interfacing with a second, opposite internal sidewall of the two internal sidewalls.
    Type: Application
    Filed: December 29, 2021
    Publication date: March 2, 2023
    Inventors: Bo Zhao, Matthew J. King, Jason Reece, Michael J. Gossman, Shruthi Kumara Vadivel, Martin J. Barclay, Lifang Xu, Joel D. Peterson, Matthew Park, Adam L. Olson, David A. Kewley, Xiaosong Zhang, Justin B. Dorhout, Zhen Feng Yow, Kah Sing Chooi, Tien Minh Quan Tran, Biow Hiem Ong
  • Publication number: 20220037360
    Abstract: A device comprises an array of elevationally-extending transistors and a circuit structure adjacent and electrically coupled to the elevationally-extending transistors of the array. The circuit structure comprises a stair step structure comprising vertically-alternating tiers comprising conductive steps that are at least partially elevationally separated from one another by insulative material. Operative conductive vias individually extend elevationally through one of the conductive steps at least to a bottom of the vertically-alternating tiers and individually electrically couple to an electronic component below the vertically-alternating tiers. Dummy structures individually extend elevationally through one of the conductive steps at least to the bottom of the vertically-alternating tiers. Methods are also disclosed.
    Type: Application
    Filed: October 18, 2021
    Publication date: February 3, 2022
    Applicant: Micron Technology, Inc.
    Inventors: Paolo Tessariol, Justin B. Dorhout, Indra V. Chary, Jun Fang, Matthew Park, Zhiqiang Xie, Scott D. Stull, Daniel Osterberg, Jason Reece, Jian Li
  • Patent number: 11177271
    Abstract: A device comprises an array of elevationally-extending transistors and a circuit structure adjacent and electrically coupled to the elevationally-extending transistors of the array. The circuit structure comprises a stair step structure comprising vertically-alternating tiers comprising conductive steps that are at least partially elevationally separated from one another by insulative material. Operative conductive vias individually extend elevationally through one of the conductive steps at least to a bottom of the vertically-alternating tiers and individually electrically couple to an electronic component below the vertically-alternating tiers. Dummy structures individually extend elevationally through one of the conductive steps at least to the bottom of the vertically-alternating tiers. Methods are also disclosed.
    Type: Grant
    Filed: September 14, 2017
    Date of Patent: November 16, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Paolo Tessariol, Justin B. Dorhout, Indra V. Chary, Jun Fang, Matthew Park, Zhiqiang Xie, Scott D. Stull, Daniel Osterberg, Jason Reece, Jian Li
  • Patent number: 11114379
    Abstract: A method used in forming integrated circuitry comprises forming a stack of vertically-alternating tiers of different composition materials. A stair-step structure is formed into the stack and an upper landing is formed adjacent and above the stair-step structure. The stair-step structure is formed to comprise vertically-alternating tiers of the different composition materials. A plurality of stairs individually comprise two of the tiers of different composition materials. At least some of the stairs individually have only two tiers that are each only of a different one of the different composition materials. An upper of the stairs that is below the upper landing comprises at least four of the tiers of different composition materials. Structure independent of method is disclosed.
    Type: Grant
    Filed: June 1, 2018
    Date of Patent: September 7, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Michael J. Gossman, M. Jared Barclay, Matthew J. King, Eldon Nelson, Matthew Park, Jason Reece, Lifang Xu, Bo Zhao
  • Publication number: 20210167079
    Abstract: Methods of improving adhesion between a photoresist and conductive or insulating structures. The method comprises forming a slot through at least a portion of alternating conductive structures and insulating structures on a substrate. Portions of the conductive structures or of the insulating structures are removed to form recesses in the conductive structures or in the insulating structures. A photoresist is formed over the alternating conductive structures and insulating structures and within the slot. Methods of improving adhesion between a photoresist and a spin-on dielectric material are also disclosed, as well as methods of forming a staircase structure.
    Type: Application
    Filed: February 11, 2021
    Publication date: June 3, 2021
    Inventors: Rohit Kothari, Jason C. McFarland, Jason Reece, David A. Kewley, Adam L. Olson
  • Patent number: 10930659
    Abstract: Methods of improving adhesion between a photoresist and conductive or insulating structures. The method comprises forming a slot through at least a portion of alternating conductive structures and insulating structures on a substrate. Portions of the conductive structures or of the insulating structures are removed to form recesses in the conductive structures or in the insulating structures. A photoresist is formed over the alternating conductive structures and insulating structures and within the slot. Methods of improving adhesion between a photoresist and a spin-on dielectric material are also disclosed, as well as methods of forming a staircase structure.
    Type: Grant
    Filed: August 5, 2019
    Date of Patent: February 23, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Rohit Kothari, Jason C. McFarland, Jason Reece, David A. Kewley, Adam L. Olson
  • Patent number: 10600796
    Abstract: Methods of improving adhesion between a photoresist and conductive or insulating structures. The method comprises forming a slot through at least a portion of alternating conductive structures and insulating structures on a substrate. Portions of the conductive structures or of the insulating structures are removed to form recesses in the conductive structures or in the insulating structures. A photoresist is formed over the alternating conductive structures and insulating structures and within the slot. Methods of improving adhesion between a photoresist and a spin-on dielectric material are also disclosed, as well as methods of forming a staircase structure.
    Type: Grant
    Filed: June 15, 2017
    Date of Patent: March 24, 2020
    Assignee: Micron Technology, Inc.
    Inventors: Rohit Kothari, Jason C. McFarland, Jason Reece, David A. Kewley, Adam L. Olson
  • Publication number: 20190371728
    Abstract: A method used in forming integrated circuitry comprises forming a stack of vertically-alternating tiers of different composition materials. A stair-step structure is formed into the stack and an upper landing is formed adjacent and above the stair-step structure. The stair-step structure is formed to comprise vertically-alternating tiers of the different composition materials. A plurality of stairs individually comprise two of the tiers of different composition materials. At least some of the stairs individually have only two tiers that are each only of a different one of the different composition materials. An upper of the stairs that is below the upper landing comprises at least four of the tiers of different composition materials. Structure independent of method is disclosed.
    Type: Application
    Filed: June 1, 2018
    Publication date: December 5, 2019
    Applicant: Micron Technology, Inc.
    Inventors: Michael J. Gossman, M. Jared Barclay, Matthew J. King, Eldon Nelson, Matthew Park, Jason Reece, Lifang Xu, Bo Zhao
  • Publication number: 20190355735
    Abstract: Methods of improving adhesion between a photoresist and conductive or insulating structures. The method comprises forming a slot through at least a portion of alternating conductive structures and insulating structures on a substrate. Portions of the conductive structures or of the insulating structures are removed to form recesses in the conductive structures or in the insulating structures. A photoresist is formed over the alternating conductive structures and insulating structures and within the slot. Methods of improving adhesion between a photoresist and a spin-on dielectric material are also disclosed, as well as methods of forming a staircase structure.
    Type: Application
    Filed: August 5, 2019
    Publication date: November 21, 2019
    Inventors: Rohit Kothari, Jason C. McFarland, Jason Reece, David A. Kewley, Adam L. Olson
  • Publication number: 20190081061
    Abstract: A device comprises an array of elevationally-extending transistors and a circuit structure adjacent and electrically coupled to the elevationally-extending transistors of the array. The circuit structure comprises a stair step structure comprising vertically-alternating tiers comprising conductive steps that are at least partially elevationally separated from one another by insulative material. Operative conductive vias individually extend elevationally through one of the conductive steps at least to a bottom of the vertically-alternating tiers and individually electrically couple to an electronic component below the vertically-alternating tiers. Dummy structures individually extend elevationally through one of the conductive steps at least to the bottom of the vertically-alternating tiers. Methods are also disclosed.
    Type: Application
    Filed: September 14, 2017
    Publication date: March 14, 2019
    Inventors: Paolo Tessariol, Justin B. Dorhout, Indra V. Chary, Jun Fang, Matthew Park, Zhiqiang Xie, Scott D. Stull, Daniel Osterberg, Jason Reece, Jian Li
  • Publication number: 20180366481
    Abstract: Methods of improving adhesion between a photoresist and conductive or insulating structures. The method comprises forming a slot through at least a portion of alternating conductive structures and insulating structures on a substrate. Portions of the conductive structures or of the insulating structures are removed to form recesses in the conductive structures or in the insulating structures. A photoresist is formed over the alternating conductive structures and insulating structures and within the slot. Methods of improving adhesion between a photoresist and a spin-on dielectric material are also disclosed, as well as methods of forming a staircase structure.
    Type: Application
    Filed: June 15, 2017
    Publication date: December 20, 2018
    Inventors: Rohit Kothari, Jason C. McFarland, Jason Reece, David A. Kewley, Adam L. Olson