Patents by Inventor Jason Robert SHIELDS

Jason Robert SHIELDS has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Protected lens cover plate for an optical metrology device
    Patent number: 9958673
    Abstract: A cover plate or lens for an optical metrology device that is positioned under a wafer during measurement is protected with a purge device. The purge device may include a ring that extends around a periphery of the cover plate or lens. The ring includes a plurality of apertures through which a purge gas or air is expelled over the surface of the cover plate or lens. Additionally or alternatively, one or more heating elements may be provided that extend around the periphery of the cover plate or lens. The heating elements heat the cover plate above a dewpoint temperature of contaminant vapor. A heat sensor may be used to monitor the temperature of the cover plate to control the heating elements and/or to compensate for optical changes of the cover plate caused by heating during measurement of a wafer.
    Type: Grant
    Filed: July 24, 2015
    Date of Patent: May 1, 2018
    Assignee: Nanometrics Incorporated
    Inventors: Jason Robert Shields, Nir Ben Moshe, Andrew J. Hazelton
  • PROTECTED LENS COVER PLATE FOR AN OPTICAL METROLOGY DEVICE
    Publication number: 20160033763
    Abstract: A cover plate or lens for an optical metrology device that is positioned under a wafer during measurement is protected with a purge device. The purge device may include a ring that extends around a periphery of the cover plate or lens. The ring includes a plurality of apertures through which a purge gas or air is expelled over the surface of the cover plate or lens. Additionally or alternatively, one or more heating elements may be provided that extend around the periphery of the cover plate or lens. The heating elements heat the cover plate above a dewpoint temperature of contaminant vapor. A heat sensor may be used to monitor the temperature of the cover plate to control the heating elements and/or to compensate for optical changes of the cover plate caused by heating during measurement of a wafer.
    Type: Application
    Filed: July 24, 2015
    Publication date: February 4, 2016
    Inventors: Jason Robert SHIELDS, Nir Ben Moshe, Andrew J. Hazelton