Abstract: A compound comprising a composition Ax(M?1?aM?a)y(XD4)z, Ax(M?1?aM?a)y(DXD4)z, or Ax(M?1?aM?a)y(X2D7)z, (A1?aM?a)xM?y(XD4)z, (A1?aM?a)xM?y(DXD4)z, or (A1?aM?a)xM?y(X2D7)z. In the compound, A is at least one of an alkali metal and hydrogen, M? is a first-row transition metal, X is at least one of phosphorus, sulfur, arsenic, molybdenum, and tungsten, M? any of a Group IIA, IIIA, IVA, VA, VIA, VIIA, VIIIA, IB, IIB, IIIB, IVB, VB, and VIB metal, D is at least one of oxygen, nitrogen, carbon, or a halogen, 0.0001<a?0.1, and x, y, and z are greater than zero. The compound can be used in an electrochemical device including electrodes and storage batteries.

Abstract: A compound comprising a composition Ax(M?1?aM?a)y(XD4)z, Ax(M?1?aM?a)y(DXD4)z, or Ax(M?1?aM?a)y(X2D7)z, (A1?aM?a)xM?y(XD4)z, (A1?aM?a)xM?y(DXD4)z, or (A1?aM?a)xM?y(X2D7)z. In the compound, A is at least one of an alkali metal and hydrogen, M? is a first-row transition metal, X is at least one of phosphorus, sulfur, arsenic, molybdenum, and tungsten, M? any of a Group IIA, IIIA, IVA, VA, VIA, VIIA, VIIIA, IB, IIB, IIIB, IVB, VB, and VIB metal, D is at least one of oxygen, nitrogen, carbon, or a halogen, 0.0001<a?0.1, and x, y, and z are greater than zero. The compound can be used in an electrochemical device including electrodes and storage batteries.

Abstract: A compound comprising a composition Ax(M?1-aM?a)y(XD4)z, Ax(M?1-aM?a)y(DXD4)z, or Ax(M?1-aM?a)y(X2D7)z, and have values such that x, plus y(1?a) times a formal valence or valences of M?, plus ya times a formal valence or valence of M?, is equal to z times a formal valence of the XD4, X2D7, or DXD4 group; or a compound comprising a composition (A1-aM?a)xM?y(XD4)z, (A1-aM?a)xM?y(DXD4)z (A1-aM?a)xM?y(X2D7)z and have values such that (1?a)x plus the quantity ax times the formal valence or valences of M? plus y times the formal valence or valences of M? is equal to z times the formal valence of the XD4, X2D7 or DXD4 group. In the compound, A is at least one of an alkali metal and hydrogen, M? is a first-row transition metal, X is at least one of phosphorus, sulfur, arsenic, molybdenum, and tungsten, M? any of a Group IIA, IIIA, IVA, VA, VIA, VIIA, VIIIA, IB, IIB, IIIB, IVB, VB, and VIB metal, D is at least one of oxygen, nitrogen, carbon, or a halogen, 0.0001<a?0.1, and x, y, and z are greater than zero.

Abstract: A substrate processing system has a housing that defines a process chamber, a gas-delivery system, a high-density plasma generating system, a substrate holder, and a controller. The housing includes a sidewall and a dome positioned above the sidewall. The dome has physically separated and noncontiguous pieces. The gas-delivery system introduces e a gas into the process chamber through side nozzles positioned between two of the physically separated and noncontiguous pieces of the dome. The high-density plasma generating system is operatively coupled with the process chamber. The substrate holder is disposed within the process chamber and supports a substrate during substrate processing. The controller controls the gas-delivery system and the high-density plasma generating system.

Abstract: A compound comprising a composition Ax(M?1-aM?a)y(XD4)z, Ax(M?1-aM?a)y(DXD4)z, or Ax(M?1-aM?a)y(X2D7)z, and have values such that x, plus y(1?a) times a formal valence or valences of M?, plus ya times a formal valence or valence of M?, is equal to z times a formal valence of the XD4, X2D7, or DXD4 group; or a compound comprising a composition (A1-aM?a)xM?y(XD4)z, (A1-aM?a)xM?y(DXD4)z (A1-aM?a)xM?y(X2D7)z and have values such that (1?a)x plus the quantity ax times the formal valence or valences of M? plus y times the formal valence or valences of M? is equal to z times the formal valence of the XD4, X2D7 or DXD4 group. In the compound, A is at least one of an alkali metal and hydrogen, M? is a first-row transition metal, X is at least one of phosphorus, sulfur, arsenic, molybdenum, and tungsten, M? any of a Group IIA, IIIA, IVA, VA, VIA, VIIA, VIIIA, IB, IIB, IIIB, IVB, VB, and VIB metal, D is at least one of oxygen, nitrogen, carbon, or a halogen, 0.0001<a?0.1, and x, y, and z are greater than zero.

Abstract: A compound comprising a composition Ax(M?1-aM?a)y(XD4)z, Ax(M?1-aM?a)y(DXD4)z, or Ax(M?1-aM?a)y(X2D7)z, and have values such that x, plus y(1-a) times a formal valence or valences of M?, plus ya times a formal valence or valence of M?, is equal to z times a formal valence of the XD4, X2D7, or DXD4 group; or a compound comprising a composition (A1-aM?a)xM?y(XD4)z, (A1-aM?a)xM?y(DXD4)z(A1-aM?a)xM?y(X2D7)z and have values such that (1-a)x plus the quantity ax times the formal valence or valences of M? plus y times the formal valence or valences of M? is equal to z times the formal valence of the XD4, X2D7 or DXD4 group. In the compound, A is at least one of an alkali metal and hydrogen, M? is a first-row transition metal, X is at least one of phosphorus, sulfur, arsenic, molybdenum, and tungsten, M? any of a Group IIA, IIIA, IVA, VA, VIA, VIIA, VIIIA, IB, IIB, IIIB, IVB, VB, and VIB metal, D is at least one of oxygen, nitrogen, carbon, or a halogen, 0.0001<a?0.1, and x, y, and z are greater than zero.

Abstract: A compound comprising a composition Ax(M′1-aM″a)y(XD4)z, Ax(M′1-aM″a)y(DXD4)z, or Ax(M′1-aM″a)y(X2D7)z, and have values such that x, plus y(1-a) times a formal valence or valences of M′, plus ya times a formal valence or valence of M″, is equal to z times a formal valence of the XD4, X2D7, or DXD4 group; or a compound comprising a composition (A1-aM″a)xM′y(XD4)z, (A1-aM″a)xM′y(DXD4)z (A1-aM″a)xM′y(X2D7)z and have values such that (1-a)x plus the quantity ax times the formal valence or valences of M″ plus y times the formal valence or valences of M′ is equal to z times the formal valence of the XD4, X2D7 or DXD4 group.