Patents by Inventor Jason Todd Steffens
Jason Todd Steffens has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10304710Abstract: Apparatuses and methods providing a ballast system for adjusting the center of gravity of a standardized front opening wafer container. Various embodiments of the disclosure present ballast systems that are low profile, do not require modifications to the shell of the wafer container, and can be retrofit to existing wafer carriers. In some embodiments, these capabilities are accomplished by a ballast that mounts to a kinematic coupling plate of the wafer container. In one embodiment, the ballasting can also provide sufficient counter force to the lifting forces associated with purging of the wafer container, thereby preventing “lift off” of the wafer container during purging operations. The ballasts can be removed for shipping of the wafer container, thereby decreasing shipping costs.Type: GrantFiled: June 18, 2014Date of Patent: May 28, 2019Assignee: Entegris, Inc.Inventors: Eric A. Kirkland, Barry Gregerson, Eric S. Olson, Christian Andersen, Jason Todd Steffens, Ryan Mushel, Karen Anderson
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Patent number: 10276414Abstract: An improved wafer support mechanism in a wafer container useful for carrying a plurality of axially aligned thin mostly circular wafer substrates. The container includes a cassette that has a plurality of adjacently disposed teeth for receiving the substrates, wherein each rib member is continuous from the cassette open top to the cassette open bottom, a removable top cover portion, a removable bottom cover portion, a cushion assembly removably attached to the container top cover, and another cushion assembly removably located in the container bottom cover and held in place by the weight of the wafer cassette. The top cushions are formed of individual segments having an extended lead-in feature at the end of each segment, spring sections in each segment and each segment has a V-shaped cross section to receive the wafer edge. The top and bottom cushions are installed in the top and bottom container covers, respectively, and extend the wafer support to approximately the entire circumference of each wafer.Type: GrantFiled: September 19, 2016Date of Patent: April 30, 2019Assignee: Entegris, Inc.Inventors: Barry Gregerson, Jason Todd Steffens, Russ V. Raschke
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Publication number: 20170062253Abstract: An improved wafer support mechanism in a wafer container useful for carrying a plurality of axially aligned thin mostly circular wafer substrates. The container includes a cassette that has a plurality of adjacently disposed teeth for receiving the substrates, wherein each rib member is continuous from the cassette open top to the cassette open bottom, a removable top cover portion, a removable bottom cover portion, a cushion assembly removably attached to the container top cover, and another cushion assembly removably located in the container bottom cover and held in place by the weight of the wafer cassette. The top cushions are formed of individual segments having an extended lead-in feature at the end of each segment, spring sections in each segment and each segment has a V-shaped cross section to receive the wafer edge. The top and bottom cushions are installed in the top and bottom container covers, respectively, and extend the wafer support to approximately the entire circumference of each wafer.Type: ApplicationFiled: September 19, 2016Publication date: March 2, 2017Inventors: Barry GREGERSON, Jason Todd STEFFENS, Russ V. RASCHKE
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Patent number: 9478450Abstract: A wafer container for holding a spaced stack of thin wafers, comprising an H-bar carrier, a base portion for receiving same, a base wafer cushion attached at the bottom wall positioned below the H-bar carrier, the cushion having a plurality of ribs defining slots each with a bottom wafer seating region having a curvature and a pair of ends, each of the ends having a flare whereby the seating region flares outwardly at the ends, a cover portion that connects with the base portion to form a closed interior. The cover portion having an uppermost wall a wafer cushion secured thereto. The cover wafer cushion having a row of wafer engaging finger portions, the finger portions Y shaped and having two legs extending from a support portion and alternatingly extending from opposing support portions, the finger portions may be S shaped with a wafer pad flared in two direction.Type: GrantFiled: April 9, 2013Date of Patent: October 25, 2016Assignee: ENTEGRIS, INC.Inventors: Russ V. Raschke, Barry Gregerson, Jason Todd Steffens
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Publication number: 20160141194Abstract: Apparatuses and methods providing a ballast system for adjusting the center of gravity of a standardized front opening wafer container. Various embodiments of the disclosure present ballast systems that are low profile, do not require modifications to the shell of the wafer container, and can be retrofit to existing wafer carriers. In some embodiments, these capabilities are accomplished by a ballast that mounts to a kinematic coupling plate of the wafer container. In one embodiment, the ballasting can also provide sufficient counter force to the lifting forces associated with purging of the wafer container, thereby preventing “lift off” of the wafer container during purging operations. The ballasts can be removed for shipping of the wafer container, thereby decreasing shipping costs.Type: ApplicationFiled: June 18, 2014Publication date: May 19, 2016Applicant: Entegris, Inc.Inventors: Eric A. KIRKLAND, Barry GREGERSON, Eric S. OLSON, Christian ANDERSEN, Jason Todd STEFFENS, Ryan MUSEL, Karen ANDERSON
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Publication number: 20150068949Abstract: A wafer container for holding a spaced stack of thin wafers, comprising an H-bar carrier, a base portion for receiving same, a base wafer cushion attached at the bottom wall positioned below the H-bar carrier, the cushion having a plurality of ribs defining slots each with a bottom wafer seating region having a curvature and a pair of ends, each of the ends having a flare whereby the seating region flares outwardly at the ends, a cover portion that connects with the base portion to form a closed interior. The cover portion having an uppermost wall a wafer cushion secured thereto. The cover wafer cushion having a row of wafer engaging finger portions, the finger portions Y shaped and having two legs extending from a support portion and alternatingly extending from opposing support portions, the finger portions may be S shaped with a wafer pad flared in two direction.Type: ApplicationFiled: April 9, 2013Publication date: March 12, 2015Applicant: ENTEGRIS, INCInventors: Russ V. Raschke, Barry Gregerson, Jason Todd Steffens
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Patent number: 8919563Abstract: A front semiconductor opening wafer container for large diameter wafers includes a container portion and a door. The container portion includes a left closed side, a right closed side, a closed back, an open front, and an open interior including a plurality of slots for receiving and containing the wafers. The door is attachable to the container portion to close the open front and selectively latchable to the container portion. The container portion can accommodate large diameter wafers, particularly 450 mm wafers. Optimized sag control is provided as well as enhanced structural rigidity, and wafer seating features.Type: GrantFiled: March 19, 2013Date of Patent: December 30, 2014Assignee: Entegris, Inc.Inventors: Barry Gregerson, Michael Shawn Adams, Jason Todd Steffens
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Publication number: 20110005967Abstract: A front opening semiconductor wafer container for large diameter wafers includes a container portion and a door. The container portion includes a left closed side, a right closed side, a closed back, an open front, and an open interior including a plurality of slots for receiving and containing the wafers. The door is attachable to the container portion to close the open front and selectively latchable to the container portion. The container portion includes a means for accommodating large diameter wafers, particularly 450 mm wafers. Optimized sag control is provided as well as enhanced structural rigidity, and wafer seating features.Type: ApplicationFiled: January 13, 2009Publication date: January 13, 2011Applicant: ENTEGRIS, INC.Inventors: Barry Gregerson, Michael Shawn Adams, Jason Todd Steffens
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Patent number: D723239Type: GrantFiled: August 30, 2012Date of Patent: February 24, 2015Assignee: Entegris, Inc.Inventors: Russ V. Raschke, Eric S. Olson, Jason Todd Steffens