Patents by Inventor Jason W. Silbergleit

Jason W. Silbergleit has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of stabilizing oxide etch and chamber performance using seasoning
    Patent number: 6899785
    Abstract: Undesirable reactions (such as formation of volatile compounds or complexes) are recognized to occur during production processes (such as etching with fluorine) at interior surfaces of a reactor chamber (such as a silicon-based reactor chamber). These undesirable reactions may be minimized and controlled by priming the chamber surface by incorporating seasoning atoms and/or molecules.
    Type: Grant
    Filed: November 5, 2001
    Date of Patent: May 31, 2005
    Assignee: International Business Machines Corporation
    Inventors: Kellie L. Dutra, Margaret L. Gibson, Ronald G. Meunier, Jason W. Silbergleit
  • Method of stabilizing oxide etch and chamber performance using seasoning
    Publication number: 20030092272
    Abstract: Undesirable reactions (such as formation of volatile compounds or complexes) are recognized to occur during production processes (such as etching with fluorine) at interior surfaces of a reactor chamber (such as a silicon-based reactor chamber). These undesirable reactions may be minimized and controlled by priming the chamber surface by incorporating seasoning atoms and/or molecules.
    Type: Application
    Filed: November 5, 2001
    Publication date: May 15, 2003
    Inventors: Kellie L. Dutra, Margaret L. Gibson, Ronald G. Meunier, Jason W. Silbergleit