Patents by Inventor Jasper Goh

Jasper Goh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Multi-variable regression for metrology
    Patent number: 7966142
    Abstract: A method for assessing metrology tool accuracy is described. Multi-variable regression is used to define the accuracy of a metrology tool such that the interaction between different measurement parameters is taken into account. A metrology tool under test (MTUT) and a reference metrology tool (RMT) are used to measure a set of test profiles. The MTUT measures the test profiles to generate a MTUT data set for a first measurement parameter. The RMT measures the test profiles to generate RMT data sets for the first measurement parameter, and at least a second measurement parameter. Multi-variable regression is then performed to generate a best-fit plane for the data sets. The coefficient of determination (R2 value) represents the accuracy index of the MTUT.
    Type: Grant
    Filed: April 15, 2008
    Date of Patent: June 21, 2011
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Wen Zhan Zhou, Zheng Zou, Jasper Goh, Mei Sheng Zhou
  • MULTI-VARIABLE REGRESSION FOR METROLOGY
    Publication number: 20090258445
    Abstract: A method for assessing metrology tool accuracy is described. Multi-variable regression is used to define the accuracy of a metrology tool such that the interaction between different measurement parameters is taken into account. A metrology tool under test (MTUT) and a reference metrology tool (RMT) are used to measure a set of test profiles. The MTUT measures the test profiles to generate a MTUT data set for a first measurement parameter. The RMT measures the test profiles to generate RMT data sets for the first measurement parameter, and at least a second measurement parameter. Multi-variable regression is then performed to generate a best-fit plane for the data sets. The coefficient of determination (R2 value) represents the accuracy index of the MTUT.
    Type: Application
    Filed: April 15, 2008
    Publication date: October 15, 2009
    Applicant: CHARTERED SEMICONDUCTOR MANUFACTURING, LTD.
    Inventors: Wen Zhan ZHOU, Zheng ZOU, Jasper GOH, Mei Sheng ZHOU
  • INTEGRATED CIRCUIT SYSTEM EMPLOYING FEED-FORWARD CONTROL
    Publication number: 20090179307
    Abstract: An integrated circuit system that includes: providing a substrate and a material layer; measuring a parameter of the material layer; and correlating the thickness of an anti-reflective layer to the measured parameter of the material layer for critical dimension control.
    Type: Application
    Filed: January 15, 2008
    Publication date: July 16, 2009
    Applicant: CHARTERED SEMICONDUCTOR MANUFACTURING LTD.
    Inventors: Wenzhan Zhou, Jasper Goh, Hui Peng Koh, Jung Yu Hsieh, Meisheng Zhou