Abstract: An apparatus for leveling an array of microscopic pens with respect to a substrate surface is provided. The apparatus includes an array of microscopic pens; a substrate having a substrate surface; a controllable arm comprising a spherical ball on an end thereof; a force sensor configured to measure a force exerted on the array or the substrate surface at each of the plurality of positions; one or more actuators configured to drive the array and/or the substrate to vary a relative distance and a relative tilting between the array and the substrate surface; and a controller configured to determine a planar offset of the array with respect to the substrate and initiate a leveling of the array with respect to the substrate based on the planar offset. Methods are also provided.

Abstract: Devices for leveling an object for patterning a substrate surface, including an array of scanning probe tips, are provided. A device may include a support structure adapted to mount an object, the object having a plurality of protrusions adapted to form a pattern on a surface of a substrate upon contact of the object to the surface; and at least one flexible joint assembly mounted to the support structure and adapted to allow the object to achieve a parallel orientation with respect to the surface upon contact of the object to the surface. Also provided are apparatuses and kits incorporating the devices and methods of making and using the devices and apparatuses.

Abstract: Improved environmental control system for improved nanolithography, imaging, detecting, and fabricating. An article comprising: at least one environmental chamber; at least one conditioning chamber adapted to be in gaseous communication with the environmental chamber, wherein the conditioning chamber comprises at least one gas transport device such as a fan, optionally at least one temperature probe, and at least one heating-cooling device such as a thermoelectric device which in operation provides a cold side and a hot side, at least one water vapor source, and at least one temperature sensor, at least one humidity sensor, wherein the fan, the thermoelectric device, the water vapor source, the temperature sensor, and the humidity sensor are adapted for a temperature controlled and humidity controlled gaseous flow. Two fans can be used, wherein the fans can transport air in the same direction or in opposite directions.