Patents by Inventor Javad Pourhashemi

Javad Pourhashemi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6123775
    Abstract: A component useful for a plasma reaction chamber includes a heat sink such as a temperature-controlled support member and a heated member such as an electrically powered showerhead electrode. The showerhead electrode is peripherally secured to the support member to enclose a gas distribution chamber between a top surface of the electrode and a bottom surface of the support member. A heat transfer member extends between the electrode and the support member and transfers heat from an area of temperature buildup on the top surface of the showerhead electrode to the bottom surface of the support member in order to control the temperature distribution across the showerhead electrode.
    Type: Grant
    Filed: June 30, 1999
    Date of Patent: September 26, 2000
    Assignee: Lam Research Corporation
    Inventors: Fangli Hao, Rajinder Dhindsa, Javad Pourhashemi