Patents by Inventor Jay M. Brown

Jay M. Brown has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Photolithographic technique and illuminator using real-time addressable phase shift light shift
    Patent number: 5539567
    Abstract: A phase shift illuminator (700) is comprised of a light source (704) and a phase modulator (716), typically a flexure beam micromirror array, which transversely modulates the incident light beam. When a flexure beam micromirror array is used as the phase modulator (716) a polarizing beam splitter (712) and a quarter-wave plate (714) are used to separate the incident and reflected light beams. The phase modulated light beam (720) from the optical illuminator may be used in optical lithography by passing the light beam through a lithography mask (724), typically after the light beam is phase modulated, and focusing the light beam onto a target wafer (726).
    Type: Grant
    Filed: June 16, 1994
    Date of Patent: July 23, 1996
    Assignee: Texas Instruments Incorporated
    Inventors: Tsen-Hwang Lin, Shane R. Palmer, Steven C. Gustafson, Jay M. Brown
  • Method of exposing a light sensitive material
    Patent number: 5539568
    Abstract: A phase shift illuminator (700) is comprised of a light source (704) and a phase modulator (716), typically a flexure beam micromirror array, which transversely modulates the incident light beam. When a flexure beam micromirror array is used as the phase modulator (716) a polarizing beam splitter (712) and a quarter-wave plate (714) are used to separate the incident and reflected light beams. The phase modulated light beam (720) from the optical illuminator may be used in optical lithography by passing the light beam through a lithography mask (724), typically after the light beam is phase modulated, and focusing the light beam onto a target wafer (726).
    Type: Grant
    Filed: June 7, 1995
    Date of Patent: July 23, 1996
    Assignee: Texas Instruments Incorporated
    Inventors: Tsen-Hwang Lin, Shane R. Palmer, Steven C. Gustafson, Jay M. Brown
  • Memorabilia storage device
    Patent number: D722111
    Type: Grant
    Filed: July 31, 2013
    Date of Patent: February 3, 2015
    Inventor: Jay M. Brown