Abstract: A method of filling features of a substrate to produce a planar patterned surface on said substrate is disclosed. The method includes the steps of: providing a substrate containing a pattern of features defined by a dielectric material; depositing thereon a layer of a conductor, whereby first portions of the conductive layer cover the dielectric material, second portions of the conductor layer fill the features, and third sidewall portions of the conductive layer connect the first and second portions; coating the substrate with a resist and patterning the resist with a resist pattern similar to said pattern of features; etching away all portions of the conductor layer, except the second portions filling the features, by etching under conditions such that lateral etching of the sidewall portions of the conductor layer is inhibited; and stripping the resist to result in a substrate having a substantially planar patterned surface. Planarized multichip modules and integrated circuits are also disclosed.

Abstract: The surface of metallic features are coated with a desensitizer composition comprising an amino-silane to reduce the likelihood of chemical interaction between the metallic feature and a photosensitive functional group that is included in a dielectric composition that is coated over the metallic features. The chemical interaction adversely affects the photosensitivity of the dielectric composition and, thus, inhibits the formation of complete and well defined via interconnections through the dielectric composition.

Abstract: The disclosure depicts a novel gas switch comprising a membrane having at least one passageway separating a first gas containing region from a second gas containing region. The gas switch also comprises a liquid having a low vapor pressure contained at least within the passageway of the membrane. The liquid is contained in the passageway when a pressure difference between the first and second regions is less than a first predetermined value, thereby preventing a gas exchange between the first and second regions. When the pressure difference across the membrane exceeds a second predetermined value the liquid substantially flows out of the passageway, thereby opening the passageway for a gas exchange between the first and second regions; and when the pressure difference across the membrane is reestablished at a value less than the first predetermined value, the fluid flows back into the passageway thereby closing the passageway and ending the gas exchange between the first and second region.